Abstract
Mechanical resonators, such as microcantilevers, demonstrate significant potential for use in information technology. Cantilevered beams of various geometries clamped at one end form the most ubiquitous structures in microelectromechanical systems (MEMSs) that support multimode vibration for the detection, conversion, and processing of small signals. In this study, we demonstrate that the potential of these devices can be further extended by utilizing a strategy based on mode coupling and locking induced by asymmetric photothermal modulation. A cantilever was designed to have a Π-shape with a specific geometry such that the resonant frequencies of the two orthogonal modes are close to one another. Additionally, we show that mode coupling between the two modes, which are originally orthogonal to one another, can be achieved through laser-induced photothermal modulation. In particular, the two modes can be parametrically tuned to become degenerate through mode coupling with a significant increase in the quality factor from 112 to 839. This approach is universal and can be extended to improve the detection limits of microresonators in high-dissipation environments with enhanced signal-to-noise ratios.
Erratum: CORRIGENDUM: Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators