Material Processing with Glow Discharge Beams

Nature ◽  
1968 ◽  
Vol 220 (5173) ◽  
pp. 1179-1182 ◽  
Author(s):  
R. A. DUGDALE
Keyword(s):  
Material Processing ◽  
Glow Discharge

Methods of Improving Glow-Discharge-Deposited a-Si1−xGex:H

1991 ◽  
Vol 219 ◽  
Author(s):  
Y. S. Tsuo ◽  
Y. Xu ◽  
E. A. Ramsay ◽  
R. S. Crandall ◽  
S. J. Salomon ◽  
...  
Keyword(s):  
Material Processing ◽  
Glow Discharge ◽  
Substrate Temperature ◽  
Gas Mixtures ◽  
Gas Composition ◽  
Processing Methods ◽  
Helium 4 ◽  
Process Gas

ABSTRACTWe have studied methods of improving glow-discharge-deposited a-Si1−x Gex :H alloys deposited using silane and germane gas mixtures. Material processing methods studied include (1) varying the substrate temperature from 170° to 280°C, (2) varying the process gas composition and pressure, (3) dilution of the feed gas by hydrogen, argon, or helium, (4) enhancing etching during deposition by adding small amounts of XeF2 vapor into the process gas, and (5) postdeposition annealing and/or hydrogenation.

Glow Discharge Material Processing

1972 ◽  
Vol 23 (11) ◽  
pp. 679-679
Author(s):  
K J H Mackay
Keyword(s):  
Material Processing ◽  
Glow Discharge

Treatment of polyethylene terephthalate in a He glow discharge

2001 ◽  
Vol 11 (PR3) ◽  
pp. Pr3-357-Pr3-362 ◽  
Author(s):  
D. D. Papakonstantinou ◽  
D. Mataras ◽  
Arefi-Khonsari
Keyword(s):  
Glow Discharge ◽  
Polyethylene Terephthalate

A. C. Stark effect on the 4713 Å line emitted by a helium glow discharge in the field of a multimode T.E.A. CO2 laser

1982 ◽  
Vol 43 (6) ◽  
pp. 875-881 ◽  
Author(s):  
B. Dubreuil ◽  
P. Pignolet ◽  
A. Catherinot ◽  
P. Davy
Keyword(s):  
Glow Discharge ◽  
Co2 Laser ◽  
Stark Effect

THE BAND GAP OF GLOW-DISCHARGE-PRODUCED AMORPHOUS SiOx

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-1025-C4-1028 ◽  
Author(s):  
R. Carius ◽  
R. Fischer ◽  
E. Holzenkämpfer
Keyword(s):  
Glow Discharge ◽  
Band Gap

Decomposition Process of Benzene in a Low Pressure DC Glow Discharge

2010 ◽  
Vol 130 (11) ◽  
pp. 1004-1008
Author(s):  
Shinobu Hayashi ◽  
Kohki Satoh ◽  
Hidenori Itoh
Keyword(s):  
Glow Discharge ◽  
Low Pressure ◽  
Decomposition Process ◽  
Dc Glow Discharge

Decomposition Characteristics of an Artificial Biogas in a Low-Pressure DC Glow Discharge

2011 ◽  
Vol 131 (9) ◽  
pp. 757-763
Author(s):  
Yasuhiro Itoh ◽  
Takamasa Oshita ◽  
Kohki Satoh ◽  
Hidenori Itoh
Keyword(s):  
Glow Discharge ◽  
Low Pressure ◽  
Dc Glow Discharge

Production of Atmospheric-Pressure Glow Discharge

2003 ◽  
Vol 79 (10) ◽  
pp. 1002-1008 ◽  
Author(s):  
Koichi TAKAKI ◽  
Tamiya FUJIWARA ◽  
Fumiyoshi TOCHIKUBO
Keyword(s):  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Glow Discharge ◽  
Pressure Glow Discharge
Sign in / Sign up

Export Citation Format

Share Document