scholarly journals Rapid Prototyping of Fresnel Zone PlatesviaDirect Ga+Ion Beam Lithography for High-Resolution X-ray Imaging

ACS Nano ◽  
2013 ◽  
Vol 7 (11) ◽  
pp. 9788-9797 ◽  
Author(s):  
Kahraman Keskinbora ◽  
Corinne Grévent ◽  
Ulrike Eigenthaler ◽  
Markus Weigand ◽  
Gisela Schütz
Keyword(s):  
High Resolution ◽  
Rapid Prototyping ◽  
Fresnel Zone ◽  
Ion Beam ◽  
X Ray ◽  
Ion Beam Lithography ◽  
X Ray Imaging

scholarly journals High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography

2018 ◽  
Vol 9 ◽  
pp. 2049-2056 ◽  
Author(s):  
Kahraman Keskinbora ◽  
Umut Tunca Sanli ◽  
Margarita Baluktsian ◽  
Corinne Grévent ◽  
Markus Weigand ◽  
...  
Keyword(s):  
High Resolution ◽  
Fresnel Zone ◽  
Ion Beam ◽  
Process Conditions ◽  
High Resolution Imaging ◽  
Direct Writing ◽  
X Ray ◽  
Ion Beam Lithography ◽  
Zone Plates ◽  
Resolution Imaging

Fresnel zone plates (FZP) are diffractive photonic devices used for high-resolution imaging and lithography at short wavelengths. Their fabrication requires nano-machining capabilities with exceptional precision and strict tolerances such as those enabled by modern lithography methods. In particular, ion beam lithography (IBL) is a noteworthy method thanks to its robust direct writing/milling capability. IBL allows for rapid prototyping of high-resolution FZPs that can be used for high-resolution imaging at soft X-ray energies. Here, we discuss improvements in the process enabling us to write zones down to 15 nm in width, achieving an effective outermost zone width of 30 nm. With a 35% reduction in process time and an increase in resolution by 26% compared to our previous results, we were able to resolve 21 nm features of a test sample using the FZP. The new process conditions are then applied for fabrication of large arrays of high-resolution zone plates. Results show that relatively large areas can be decorated with nanostructured devices via IBL by using multipurpose SEM/FIB instruments with potential applications in FEL focusing, extreme UV and soft X-ray lithography and as wavefront sensing devices for beam diagnostics.

scholarly journals Ion beam lithography for Fresnel zone plates in X-ray microscopy

2013 ◽  
Vol 21 (10) ◽  
pp. 11747 ◽  
Author(s):  
Kahraman Keskinbora ◽  
Corinne Grévent ◽  
Michael Bechtel ◽  
Markus Weigand ◽  
Eberhard Goering ◽  
...  
Keyword(s):  
Fresnel Zone ◽  
Ion Beam ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Ion Beam Lithography ◽  
Zone Plates

Development of large-field high-resolution hard x-ray imaging microscopy and microtomography with Fresnel zone plate objective

2013 ◽  
Author(s):  
Yoshio Suzuki ◽  
Akihisa Takeuchi ◽  
Yasuko Terada ◽  
Kentaro Uesugi ◽  
Shigeharu Tamura
Keyword(s):  
High Resolution ◽  
Fresnel Zone ◽  
Zone Plate ◽  
Large Field ◽  
Fresnel Zone Plate ◽  
X Ray ◽  
X Ray Imaging

X-ray microscopy at the ALS: Partial coherent image modeling

1994 ◽  
Vol 52 ◽  
pp. 70-71
Author(s):  
L. Jochum ◽  
W. Meyer-Ilse ◽  
H. Medecki ◽  
D. Attwood
Keyword(s):  
High Resolution ◽  
Fresnel Zone ◽  
Zone Plate ◽  
Image Modeling ◽  
X Ray ◽  
Resource Center ◽  
X Ray Imaging ◽  
Coherent Image ◽  
Before And After ◽  
Monochromatic Illumination

A Biological X-ray Microscopy Resource Center is planned to be built at the Advanced Light Source (ALS) in Berkeley. The first instrument will be the High Resolution Zone Plate Microscope (XM-1) installed at the bending magnet beam line 6.12. It will be operational in August 1994. The optical setup of this x-ray microscope is analog to a conventional visible light microscope using critical illumination (Fig. 1). Fresnel zone plates are used for both condenser and high resolution objective. The condenser zone plate illuminates the sample, and at the same time, in combination with a pinhole, acts as a monochromator providing quasi monochromatic illumination. The high resolution objective zone plate is used to create an enlarged image of the sample on a back-illuminated CCD detector. Exposure times for images with 1000 by 1000 pixels are expected to be a few seconds. In order to permit examination of the sample before and after the x-ray imaging, the design of our instrument includes two visiblelight microscopes.

scholarly journals Large field-of-view X-ray imaging by using a Fresnel zone plate

2012 ◽  
Vol 30 (1) ◽  
pp. 87-93 ◽  
Author(s):  
Xiao-Fang Wang ◽  
Jin-Yu Wang ◽  
Xiao-Hu Chen ◽  
Xin-Gong Chen ◽  
Lai Wei
Keyword(s):  
High Resolution ◽  
Fresnel Zone ◽  
Numerical Study ◽  
Field Of View ◽  
Zone Plate ◽  
Large Field ◽  
Fresnel Zone Plate ◽  
X Rays ◽  
X Ray ◽  
X Ray Imaging

AbstractTo diagnose the implosion of a laser-driven-fusion target such as the symmetry, the hydrodynamic instability at the interface, a high-resolution, large field-of-view kilo-electron-volt X-ray imaging is required. A Kirkpatrick-Baez (K-B) microscope is commonly used, but its field of view is limited to a few hundred microns as the resolution decreases rapidly with the increase of the field of view. A higher resolution could be realized by using a Fresnel zone plate (FZP) for imaging. Presented in this work is a numerical study on the imaging properties of an FZP at Ti-Kα wavelength of 0.275 nm, and a comparison to a K-B imager. It is found that the FZP can realize not only a resolution better than 1 µm, but also a field-of-view larger than 20 mm when the FZP is illuminated by X-rays of spectral bandwidth less than 1.75%. These results indicate the feasibility of applying the FZP in high-resolution, large field-of-view X-ray imaging.

scholarly journals Diamond refractive micro-lenses for full-field X-ray imaging and microscopy produced with ion beam lithography

2020 ◽  
Vol 28 (4) ◽  
pp. 4773 ◽  
Author(s):  
Polina Medvedskaya ◽  
Ivan Lyatun ◽  
Sergey Shevyrtalov ◽  
Maxim Polikarpov ◽  
Irina Snigireva ◽  
...  
Keyword(s):  
Ion Beam ◽  
Full Field ◽  
X Ray ◽  
Ion Beam Lithography ◽  
X Ray Imaging

scholarly journals Revealing Inflammatory Indications Induced by Titanium Alloy Wear Debris in Periprosthetic Tissue by Label-Free Correlative High-Resolution Ion, Electron and Optical Microspectroscopy

Materials ◽  
2021 ◽  
Vol 14 (11) ◽  
pp. 3048
Author(s):  
Rok Podlipec ◽  
Esther Punzón-Quijorna ◽  
Luka Pirker ◽  
Mitja Kelemen ◽  
Primož Vavpetič ◽  
...  
Keyword(s):  
Titanium Alloy ◽  
High Resolution ◽  
Wear Debris ◽  
Ion Beam ◽  
Quantitative Measure ◽  
Label Free ◽  
Periprosthetic Tissue ◽  
Correlative Microscopy ◽  
X Ray ◽  
Tissue Reactions

The metallic-associated adverse local tissue reactions (ALTR) and events accompanying worn-broken implant materials are still poorly understood on the subcellular and molecular level. Current immunohistochemical techniques lack spatial resolution and chemical sensitivity to investigate causal relations between material and biological response on submicron and even nanoscale. In our study, new insights of titanium alloy debris-tissue interaction were revealed by the implementation of label-free high-resolution correlative microscopy approaches. We have successfully characterized its chemical and biological impact on the periprosthetic tissue obtained at revision surgery of a fractured titanium-alloy modular neck of a patient with hip osteoarthritis. We applied a combination of photon, electron and ion beam micro-spectroscopy techniques, including hybrid optical fluorescence and reflectance micro-spectroscopy, scanning electron microscopy (SEM), Energy-dispersive X-ray Spectroscopy (EDS), helium ion microscopy (HIM) and micro-particle-induced X-ray emission (micro-PIXE). Micron-sized wear debris were found as the main cause of the tissue oxidative stress exhibited through lipopigments accumulation in the nearby lysosome. This may explain the indications of chronic inflammation from prior histologic examination. Furthermore, insights on extensive fretting and corrosion of the debris on nm scale and a quantitative measure of significant Al and V release into the tissue together with hydroxyapatite-like layer formation particularly bound to the regions with the highest Al content were revealed. The functional and structural information obtained at molecular and subcellular level contributes to a better understanding of the macroscopic inflammatory processes observed in the tissue level. The established label-free correlative microscopy approach can efficiently be adopted to study any other clinical cases related to ALTR.

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