Wafer-Scale Fabrication of Plasmonic Crystals from Patterned Silicon Templates Prepared by Nanosphere Lithography

Nano Letters ◽  
2013 ◽  
Vol 13 (6) ◽  
pp. 2623-2627 ◽  
Author(s):  
Anthony Shoji Hall ◽  
Stuart A. Friesen ◽  
Thomas E. Mallouk
Keyword(s):  
Nanosphere Lithography ◽  
Wafer Scale ◽  
Plasmonic Crystals

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

2011 ◽  
Vol 29 (2) ◽  
pp. 021012 ◽  
Author(s):  
Mona J. K. Klein ◽  
Franck Montagne ◽  
Nicolas Blondiaux ◽  
Oscar Vazquez-Mena ◽  
Harry Heinzelmann ◽  
...  
Keyword(s):  
Nanosphere Lithography ◽  
Wafer Scale ◽  
Hole Arrays

Wafer scale integration

1988 ◽  
Vol 135 (6) ◽  
pp. 281
Author(s):  
J.B. Butcher ◽  
K.K. Johnstone
Keyword(s):  
Wafer Scale ◽  
Wafer Scale Integration ◽  
Scale Integration

Investigation of Plasma Treatment Conditions for Wafer-Scale Room-Temperature Bonding Using Ultrathin Au Films in Ambient Air

2019 ◽  
Vol 139 (7) ◽  
pp. 217-218
Author(s):  
Michitaka Yamamoto ◽  
Takashi Matsumae ◽  
Yuichi Kurashima ◽  
Hideki Takagi ◽  
Tadatomo Suga ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Room Temperature ◽  
Ambient Air ◽  
Wafer Scale ◽  
Treatment Conditions

Hybrid Waveguide-integrated Plasmonic Crystals on Silicon-on-Insulator Platform

2016 ◽  
Author(s):  
Guanghui Ren ◽  
Thach Nguyen ◽  
Iryna Khodasevych ◽  
Steffen Schoenhardt ◽  
Kyle J. Berean ◽  
...  
Keyword(s):  
Silicon On Insulator ◽  
Plasmonic Crystals ◽  
Hybrid Waveguide
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