scholarly journals Local Electron Heating in Nanoscale Conductors

Nano Letters ◽  
2006 ◽  
Vol 6 (12) ◽  
pp. 2935-2938 ◽  
Author(s):  
Roberto D'Agosta ◽  
Na Sai ◽  
Massimiliano Di Ventra
2001 ◽  
Vol 27 (8) ◽  
pp. 652-658 ◽  
Author(s):  
V. G. Ledenev ◽  
A. P. Starygin

2015 ◽  
Vol 120 (12) ◽  
pp. 10,317-10,333 ◽  
Author(s):  
Fuminori Tsuchiya ◽  
Masato Kagitani ◽  
Kazuo Yoshioka ◽  
Tomoki Kimura ◽  
Go Murakami ◽  
...  

Author(s):  
L. D. Jackel

Most production electron beam lithography systems can pattern minimum features a few tenths of a micron across. Linewidth in these systems is usually limited by the quality of the exposing beam and by electron scattering in the resist and substrate. By using a smaller spot along with exposure techniques that minimize scattering and its effects, laboratory e-beam lithography systems can now make features hundredths of a micron wide on standard substrate material. This talk will outline sane of these high- resolution e-beam lithography techniques.We first consider parameters of the exposure process that limit resolution in organic resists. For concreteness suppose that we have a “positive” resist in which exposing electrons break bonds in the resist molecules thus increasing the exposed resist's solubility in a developer. Ihe attainable resolution is obviously limited by the overall width of the exposing beam, but the spatial distribution of the beam intensity, the beam “profile” , also contributes to the resolution. Depending on the local electron dose, more or less resist bonds are broken resulting in slower or faster dissolution in the developer.


Author(s):  
L. Adhikari ◽  
G.P. Zank ◽  
L.-L. Zhao ◽  
M. Nakanotani ◽  
S. Tasnim

2012 ◽  
Vol E95-C (4) ◽  
pp. 564-571 ◽  
Author(s):  
Kousuke MIYAJI ◽  
Kentaro HONDA ◽  
Shuhei TANAKAMARU ◽  
Shinji MIYANO ◽  
Ken TAKEUCHI
Keyword(s):  

2019 ◽  
Vol 26 (10) ◽  
pp. 103101
Author(s):  
Chong Lv ◽  
Bao-Zhen Zhao ◽  
Feng Wan ◽  
Hong-Bo Cai ◽  
Xiang-Hao Meng ◽  
...  

1994 ◽  
Vol 49 (4) ◽  
pp. 2959-2962 ◽  
Author(s):  
Kookjin Chun ◽  
Norman O. Birge

Sign in / Sign up

Export Citation Format

Share Document