Measurements of the Reaction−Diffusion Front of Model Chemically Amplified Photoresists with Varying Photoacid Size‖
2019 ◽
Vol 150
(5)
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pp. 2216-2254
1990 ◽
Vol 430
(1879)
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pp. 315-345
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2009 ◽
Vol 108
(2)
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pp. 356-363
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1995 ◽
Vol 28
(13)
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pp. 3599-3621
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