Tunable Metallization by Assembly of Metal Nanoparticles in Polymer Thin Films by Photo- or Electron Beam Lithography

Langmuir ◽  
2005 ◽  
Vol 21 (20) ◽  
pp. 9352-9358 ◽  
Author(s):  
Dehui Yin ◽  
Shin Horiuchi ◽  
Masamichi Morita ◽  
Atsushi Takahara
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Metal Nanoparticles ◽  
Electron Beam Lithography ◽  
Polymer Thin Films

Polymer thin films embedded with in situ grown metal nanoparticles

2009 ◽  
Vol 38 (9) ◽  
pp. 2646 ◽  
Author(s):  
G. V. Ramesh ◽  
S. Porel ◽  
T. P. Radhakrishnan
Keyword(s):  
Thin Films ◽  
Metal Nanoparticles ◽  
Polymer Thin Films

Gold Nanoparticles Generated by Electron Beam Lithography of Gold(I)−Thiolate Thin Films

2005 ◽  
Vol 17 (23) ◽  
pp. 5774-5779 ◽  
Author(s):  
Muriel K. Corbierre ◽  
Jean Beerens ◽  
R. Bruce Lennox
Keyword(s):  
Thin Films ◽  
Gold Nanoparticles ◽  
Electron Beam ◽  
Electron Beam Lithography

Utilization of As50Se50 thin films in electron beam lithography

2021 ◽  
Vol 259 ◽  
pp. 124052
Author(s):  
K. Palka ◽  
M. Kurka ◽  
S. Slang ◽  
M. Vlcek
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Lithography

Electron Beam Dose and PMMA Thickness Dependent Circularity and Diameter Analysis of Au Nanodots

2019 ◽  
Vol >15 (5) ◽  
pp. 486-491 ◽  
Author(s):  
Furkan Kuruoğlu ◽  
Özgür Yavuzçetin ◽  
Ayşe Erol
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Electron Beam ◽  
Electron Beam Lithography ◽  
Thermal Evaporation ◽  
Exposure Dose ◽  
Homogeneous Distribution ◽  
Electrical And Optical Properties ◽  
Beam Dose ◽  
Au Nanodots

Background: The electrical and optical properties of nanoparticle-based devices depend on the shape, dimension and uniformity of these particles. Methods: In this work, we fabricated ordered Au nanodots using electron beam lithography and thermal evaporation. Au nanodot diameter and circularity varied with a changed exposure dose and resist thickness. Electron beam dose ranged from 5 fC to 200 fC for single dot patterns. Commonly used PMMA thin films of thicknesses 60 nm and 100 nm coated samples were used for investigating the resist thickness dependency with varying dose exposure. Results: The analyses of patterns show that the diameter and circularity of the Au nanodots ranged from smaller to larger diameters and from lower to higher circularities with increasing dose and resist thickness. Conclusion: The distributions of the nanodot diameter began to show Gaussian behavior at larger electron doses. Besides, single circularity value became dominant up to the medium doses and then a homogeneous distribution was observed with the increasing dose.

Multilayered Ordering of the Metal Nanoparticles in Polymer Thin Films under Photoirradiation

Langmuir ◽  
2011 ◽  
Vol 27 (2) ◽  
pp. 733-740 ◽  
Author(s):  
Akihiro Matsubayashi ◽  
Kenji Fukunaga ◽  
Tetsurou Tsuji ◽  
Kikuo Ataka ◽  
Hisashi Ohsaki
Keyword(s):  
Thin Films ◽  
Metal Nanoparticles ◽  
Polymer Thin Films

Polymer thin films embedded with metal nanoparticles for electrochemical biosensors applications

2013 ◽  
Vol 41 ◽  
pp. 43-53 ◽  
Author(s):  
S. Prakash ◽  
Tina Chakrabarty ◽  
Ajay K. Singh ◽  
Vinod K. Shahi
Keyword(s):  
Thin Films ◽  
Metal Nanoparticles ◽  
Polymer Thin Films ◽  
Electrochemical Biosensors

Patterning of Polymer Nanocomposite Resists Containing Metal Nanoparticles by Electron Beam Lithography

2011 ◽  
Vol 11 (8) ◽  
pp. 7390-7393 ◽  
Author(s):  
Byoung-Min Lee ◽  
Dong-Woo Kang ◽  
Chan-Hee Jung ◽  
Jae-Hak Choi ◽  
In-Tae Hwang ◽  
...  
Keyword(s):  
Electron Beam ◽  
Metal Nanoparticles ◽  
Electron Beam Lithography ◽  
Polymer Nanocomposite
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