Influence of the Pore Structure of MCM-41 and SBA-15 Silica Fibers on Atomic Layer Chemical Vapor Deposition of Cobalt Carbonyl
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2016 ◽
Vol 34
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pp. 892-897
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Vol 76
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pp. 167-175
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Vol 18
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pp. 1595-1598
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Applications of atomic layer chemical vapor deposition for the processing of nanolaminate structures
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pp. 451-462
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