Vapor-Phase Self-Assembled Monolayer for Improved Mold Release in Nanoimprint Lithography
2018 ◽
Vol 39
(11)
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pp. 1680-1683
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Keyword(s):
Keyword(s):
Keyword(s):
2015 ◽
Vol 67
(5)
◽
pp. 941-945
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2008 ◽
Vol 255
(5)
◽
pp. 2885-2889
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