Deposition Dynamics of Hydrogenated Silicon Clusters on a Crystalline Silicon Substrate under Typical Plasma Conditions†
2010 ◽
Vol 114
(9)
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pp. 3297-3305
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1996 ◽
Vol 261
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pp. 346-352
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2016 ◽
Vol 39
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pp. 89-95
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2002 ◽
Vol 106
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pp. 5081-5087
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2005 ◽
Vol 432
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pp. 559-566
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