Large-Scale Production of Amorphous Silicon Oxynitride Nanowires by Nickel-Catalyzed Transformation of Silicon Wafers in NH3 Plasma
2007 ◽
Vol 112
(1)
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pp. 27-34
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Keyword(s):
2018 ◽
Vol 15
(4)
◽
pp. 572-575
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Keyword(s):