Preparation of Highly Impermeable Hyperbranched Polymer Thin-Film Coatings Using Dendrimers First as Building Blocks and Then as in Situ Thermosetting Agents

1999 ◽  
Vol 121 (5) ◽  
pp. 923-930 ◽  
Author(s):  
Mingqi Zhao ◽  
Yuelong Liu ◽  
Richard M. Crooks ◽  
David E. Bergbreiter
1991 ◽  
Vol 239 ◽  
Author(s):  
Paul D. Garrett ◽  
Brian K. Daniels

ABSTRACTFundamental mechanical properties of a-C:H (amorphous or “diamond-like” carbon, DLC) thin film coatings have been investigated. Coatings were deposited by a methane-argon RF plasma on polycarbonate films. Tensile stress-strain behavior of the coated polymer was studied using an extensometer to monitor strain. The differences in moduli between uncoated and coated samples were used to calculate apparent coating moduli, which varied from 1 GPA to 82 GPa. The mode of failure was observed via in-situ optical microscopy during deformation. Intrinsic bond strength of the coating/substrate interface was estimated from crack spacings in the deformed coating.


1993 ◽  
Vol 308 ◽  
Author(s):  
T.M. Stokich ◽  
C.C. Fulks ◽  
M.T. Bernius ◽  
D.C. Burdeaux ◽  
P.E. Garrou ◽  
...  

ABSTRACTThis work examines the planarization of polymer thin film coatings derived from Cyclotene™ 3022 prepolymer resins. Cyclotene™ 3022 is a divinyl siloxane bis-benzocyclobutene prepolymer (DVS-BCB, CAS 117732-87-3). It is used primarily as a dielectric in microelectronics applications.Using profilometry, planarization measurements have been made on thin films spun over features consisting of lines and trenches. Feature widths have been varied from 2 to 1000 μm and the feature depths and film thickness have been varied from 1 to 16 μm. Effects of the processing procedure, resin concentration and resin additives have been explored. Local (versus global) planarization will be discussed.Planarization has been found to depend on all feature dimensions and the polymer film thickness. Lines or other structures having a width of 100 μm or less can be planarized to 90% or better with standard commercial formulations of Cyclotene™ 3022, provided that the mean film thickness is twice the line-height or feature-depth. Metals such as Al, Cu, Cr and Ti can all be planarized to this degree; however, surface preparations may influence the result.


2019 ◽  
Vol 27 (3) ◽  
pp. 301-309 ◽  
Author(s):  
Akshatha Nagaraja ◽  
Yashoda Malgar Puttaiahgowda ◽  
Ananda Kulal ◽  
Ajithkumar Manayan Parambil ◽  
Thivaharan Varadavenkatesan

2008 ◽  
Vol 24 (3) ◽  
pp. 714-719 ◽  
Author(s):  
X. Tong ◽  
A. Trivedi ◽  
H. Jia ◽  
M. Zhang ◽  
P. Wang

2005 ◽  
Author(s):  
Thilo Sandner ◽  
Jan Uwe Schmidt ◽  
Harald Schenk ◽  
Hubert Lakner ◽  
Minghong Yang ◽  
...  

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