Chemically Modified Surfaces:  Recent Developments By Joseph J. Pesek and Maria T. Matyska (San Jose State University) and Riad R. Abuelafiya (Varian Sample Preparation Products). The Royal Society of Chemistry:  Cambridge. 1996. ix + 146 pp. $89.00. ISBN 0-85404-780-8.

1997 ◽  
Vol 119 (33) ◽  
pp. 7905-7905
Author(s):  
Robin L. McCarley
2016 ◽  
Vol 255 ◽  
pp. 136-140 ◽  
Author(s):  
Nandi Vrancken ◽  
Guy Vereecke ◽  
Stef Bal ◽  
Stefanie Sergeant ◽  
Geert Doumen ◽  
...  

This work focuses on capillary-induced collapse of high-aspect-ratio silicon nanopillars. Modification of the surface chemistry is demonstrated to be an efficient approach for reducing capillary forces and consequently reduce pattern collapse. Special effort is spent on determination of the wetting state of chemically modified surfaces as complete structure wetting is of utmost importance in wet processing. In light of this, an ATR-FTIR based method has been developed to unambiguously distinguish between wetting and non-wetting states.


1993 ◽  
Vol 171 (1) ◽  
pp. 167-175
Author(s):  
A. Campbell Ling ◽  
P. A. J. Englert ◽  
C. A. Stone

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