Nanoscopic Cylindrical Dual Concentric and Lengthwise Block Brush Terpolymers as Covalent Preassembled High-Resolution and High-Sensitivity Negative-Tone Photoresist Materials

2013 ◽  
Vol 135 (11) ◽  
pp. 4203-4206 ◽  
Author(s):  
Guorong Sun ◽  
Sangho Cho ◽  
Corrie Clark ◽  
Stanislav V. Verkhoturov ◽  
Michael J. Eller ◽  
...  
Keyword(s):  
High Resolution ◽  
High Sensitivity ◽  
Negative Tone

Backscattered Electron Imaging of GaAs/AlGaAs Super Lattice Structures with an Ultra-High- Resolution SEM

1988 ◽  
Vol 46 ◽  
pp. 204-205
Author(s):  
Kazumichi Ogura ◽  
Michael M. Kersker
Keyword(s):  
High Resolution ◽  
Layer Structure ◽  
High Sensitivity ◽  
Beam Current ◽  
Electron Beam Current ◽  
Lattice Structures ◽  
Super Lattice ◽  
Different Types ◽  
Backscattered Electron ◽  
Electron Imaging

Backscattered electron (BE) images of GaAs/AlGaAs super lattice structures were observed with an ultra high resolution (UHR) SEM JSM-890 with an ultra high sensitivity BE detector. Three different types of super lattice structures of GaAs/AlGaAs were examined. Each GaAs/AlGaAs wafer was cleaved by a razor after it was heated for approximately 1 minute and its crosssectional plane was observed.First, a multi-layer structure of GaAs (100nm)/AlGaAs (lOOnm) where A1 content was successively changed from 0.4 to 0.03 was observed. Figures 1 (a) and (b) are BE images taken at an accelerating voltage of 15kV with an electron beam current of 20pA. Figure 1 (c) is a sketch of this multi-layer structure corresponding to the BE images. The various layers are clearly observed. The differences in A1 content between A1 0.35 Ga 0.65 As, A1 0.4 Ga 0.6 As, and A1 0.31 Ga 0.69 As were clearly observed in the contrast of the BE image.

High Resolution and High Sensitivity Measurement of Methane at 1.51 μm

2006 ◽  
Vol 23 (9) ◽  
pp. 2415-2417
Author(s):  
Deng Lun-Hua ◽  
Gao Xiao-Ming ◽  
Cao Zhen-Song ◽  
Zhao Wei-Xiong ◽  
Zhang Wei-Jun
Keyword(s):  
High Resolution ◽  
High Sensitivity ◽  
Sensitivity Measurement

scholarly journals High Sensitivity and Full-circle Optical Rotary Sensor for Non-cooperatively Tracing Wrist Tremor with Nanoradian Resolution

2021 ◽  
Author(s):  
Xin Xu ◽  
Zongren Dai ◽  
Yifang Wang ◽  
Mingfang Li ◽  
Yidong Tan
Keyword(s):  
High Resolution ◽  
Error Analysis ◽  
High Sensitivity ◽  
Promising Alternative ◽  
Rotation Measurement ◽  
Full Circle ◽  
Repeatability Error ◽  
Process Error ◽  
Circle Rotation ◽  
Electromagnetic Immunity

<div> <p>An optical rotary sensor based on laser self-mixing interferometry is proposed, which enables noncontact and full-circle rotation measurement of non-cooperative targets with high resolution and sensitivity. The prototype demonstrates that the resolution is 0.1μrad and the linearity is 2.33×10<sup>-4</sup>. Stability of the prototype is 2μrad over 3600s and the repeatability error is below 0.84°under 9-gruop full-circle tests. The theoretical resolution reaches up to 16nrad. Random rotation has been successfully traced with a bionic hand to simulate the tremor process. Error analysis and limitation discussion have been also carried out in the paper. Although the accuracy needs further improvement compared with the best rotary sensor, this method has its unique advantages of non-cooperative target sensing, high sensitivity and electromagnetic immunity. Hence, the optical rotary sensor provides a promising alternative in precise rotation measurement, tremor tracing and nano-motion monitoring.</p> </div> <b><br></b>

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