Initiated Chemical Vapor Deposition (iCVD) of Conformal Polymeric Nanocoatings for the Surface Modification of High-Aspect-Ratio Pores

2008 ◽  
Vol 20 (4) ◽  
pp. 1646-1651 ◽  
Author(s):  
Malancha Gupta ◽  
Vivek Kapur ◽  
Nathalie M. Pinkerton ◽  
Karen K. Gleason
RSC Advances ◽  
2017 ◽  
Vol 7 (71) ◽  
pp. 45101-45106 ◽  
Author(s):  
Gangqiang Dong ◽  
Yurong Zhou ◽  
Hailong Zhang ◽  
Fengzhen Liu ◽  
Guangyi Li ◽  
...  

High aspect ratio silicon nanowires (SiNWs) prepared by metal-assisted chemical etching were passivated by using catalytic chemical vapor deposition (Cat-CVD).


2017 ◽  
Vol 56 (6S2) ◽  
pp. 06HE02 ◽  
Author(s):  
Kohei Shima ◽  
Noboru Sato ◽  
Yuichi Funato ◽  
Yasuyuki Fukushima ◽  
Takeshi Momose ◽  
...  

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