Modulation of the Growth Per Cycle in Atomic Layer Deposition Using Reversible Surface Functionalization

2013 ◽  
Vol 25 (24) ◽  
pp. 4849-4860 ◽  
Author(s):  
Angel Yanguas-Gil ◽  
Joseph A. Libera ◽  
Jeffrey W. Elam
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Functionalization ◽  
Atomic Layer ◽  
Layer Deposition

Heterostructural coaxial nanotubes of CNT@Fe2O3 via atomic layer deposition: effects of surface functionalization and nitrogen-doping

2010 ◽  
Vol 13 (3) ◽  
pp. 1207-1218 ◽  
Author(s):  
Xiangbo Meng ◽  
Mihnea Ionescu ◽  
Mohammad Norouzi Banis ◽  
Yu Zhong ◽  
Hao Liu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Functionalization ◽  
Nitrogen Doping ◽  
Atomic Layer ◽  
Layer Deposition

Atomic layer deposition of sub-10 nm high-K gate dielectrics on top-gated MoS2 transistors without surface functionalization

2018 ◽  
Vol 443 ◽  
pp. 421-428 ◽  
Author(s):  
Yu-Shu Lin ◽  
Po-Hsien Cheng ◽  
Kuei-Wen Huang ◽  
Hsin-Chih Lin ◽  
Miin-Jang Chen
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Functionalization ◽  
Gate Dielectrics ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K

scholarly journals Controlling Atomic Layer Deposition of TiO2in Aerogels through Surface Functionalization

2009 ◽  
Vol 21 (9) ◽  
pp. 1989-1992 ◽  
Author(s):  
Sutapa Ghosal ◽  
Theodore F. Baumann ◽  
Jeffrey S. King ◽  
Sergei O. Kucheyev ◽  
Yinmin Wang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Functionalization ◽  
Atomic Layer ◽  
Layer Deposition
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