In Situ FTIR Characterization of Growth Inhibition in Atomic Layer Deposition Using Reversible Surface Functionalization

2013 ◽  
Vol 50 (13) ◽  
pp. 43-51 ◽  
Author(s):  
A. Yanguas-Gil ◽  
J. A. Libera ◽  
J. W. Elam
Keyword(s):  
Atomic Layer Deposition ◽  
Growth Inhibition ◽  
Surface Functionalization ◽  
Atomic Layer ◽  
In Situ Ftir ◽  
Ftir Characterization ◽  
Layer Deposition

Characterization of HfO N thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas

2015 ◽  
Vol 349 ◽  
pp. 757-762 ◽  
Author(s):  
Young Bok Lee ◽  
Il-Kwon Oh ◽  
Edward Namkyu Cho ◽  
Pyung Moon ◽  
Hyungjun Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Film Formation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Thin Film Formation

Atomic Layer Deposition and in Situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide

2014 ◽  
Vol 118 (48) ◽  
pp. 27749-27753 ◽  
Author(s):  
Alexander C. Kozen ◽  
Alexander J. Pearse ◽  
Chuan-Fu Lin ◽  
Marshall A. Schroeder ◽  
Malachi Noked ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Lithium Hydroxide ◽  
Lithium Oxide ◽  
In Situ Characterization ◽  
Layer Deposition

In situ synchrotron x-ray characterization of ZnO atomic layer deposition

2010 ◽  
Vol 97 (19) ◽  
pp. 191904 ◽  
Author(s):  
D. D. Fong ◽  
J. A. Eastman ◽  
S. K. Kim ◽  
T. T. Fister ◽  
M. J. Highland ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
X Ray ◽  
Layer Deposition

In-situ FTIR Study of Atomic Layer Deposition (ALD) of Copper Metal Films

2019 ◽  
Vol 11 (7) ◽  
pp. 91-101 ◽  
Author(s):  
Min Dai ◽  
Jinhee Kwon ◽  
E. Langereis ◽  
Leszek S. Wielunski ◽  
Yves Chabal ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Metal Films ◽  
In Situ Ftir ◽  
Copper Metal ◽  
Ftir Study ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document