Structure versus Thermal Stability: The Periodic Structure of Atomic Layer Deposition-Grown Al-Incorporated HfO2Films and Its Effects on Amorphous Stabilization
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2016 ◽
Vol 8
(11)
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pp. 7489-7498
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2018 ◽
Vol 10
(6)
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pp. 6006-6013
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Vol 114
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pp. 1879-1886
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Vol 140
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pp. 4841-4848
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Vol 53
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pp. 2123-2128
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