CVD Growth Kinetics of HfB2Thin Films from the Single-Source Precursor Hf(BH4)4

2006 ◽  
Vol 18 (21) ◽  
pp. 5088-5096 ◽  
Author(s):  
Yu Yang ◽  
Sreenivas Jayaraman ◽  
Do Young Kim ◽  
Gregory S. Girolami ◽  
John R. Abelson
1999 ◽  
Vol 595 ◽  
Author(s):  
R. A. Fischer ◽  
A. Wohlfart ◽  
A. Devi ◽  
W. Rogge

AbstractWe report the growth kinetics of GaN thin films using the single source precursor bisazido dimethylaminopropyl gallium (BAZIGA) in a cold wall reactor. Transparent, smooth, epitaxial (FWHM of the αGaN 0002 rocking curve = 129.6 arcsec) and stoichiometric GaN films were grown on c-plane Al2O3 substrates in the temperature range of 870 – 1320K and high growth rates were obtained (up to 4000 nm/hr). Film growth was studied as a function of substrate temperature as well as reactor pressure. Although high quality films were obtained without using any additional source of nitrogen such as ammonia, we have investigated the effect of ammonia on the growth and properties of the resulting films. The films obtained were characterized by XRD, RBS, XPS, AES, AFM, SEM and the room temperature PL spectroscopy of GaN films grown exhibited the correct near band edge luminescence at 3.45 eV.


2000 ◽  
Vol 5 (S1) ◽  
pp. 152-158
Author(s):  
R. A. Fischer ◽  
A. Wohlfart ◽  
A. Devi ◽  
W. Rogge

We report the growth kinetics of GaN thin films using the single source precursor bisazido dimethylaminopropyl gallium (BAZIGA) in a cold wall reactor. Transparent, smooth, epitaxial (FWHM of the α-GaN 0002 rocking curve = 129.6 arcsec) and stoichiometric GaN films were grown on c-plane Al2O3 substrates in the temperature range of 870 – 1320K and high growth rates were obtained (up to 4000 nm/hr). Film growth was studied as a function of substrate temperature as well as reactor pressure. Although high quality films were obtained without using any additional source of nitrogen such as ammonia, we have investigated the effect of ammonia on the growth and properties of the resulting films. The films obtained were characterized by XRD, RBS, XPS, AES, AFM, SEM and the room temperature PL spectroscopy of GaN films grown exhibited the correct near band edge luminescence at 3.45 eV.


1994 ◽  
Vol 346 ◽  
Author(s):  
H.-P. Baldus ◽  
G. Passing

ABSTRACTThe thermal stability of amorphous borosilicon nitride (Si3B3N7) and borosilicon carbonitride (SiBN3C) between 1000°C and 2000oC both in air and under inert conditions is reported. Both materials are derived from polymerization and subsequent pyrolysis of a “single source” precursor. On heating in vacuum or nitrogen SiBN3C remains amorphous up to lCWC whereas Si3B3N7 crystallizes at about 1800°C under these conditions. At about 2000^ the SiBN(C)-materials decompose into SiC, BN, B4C and N2.Oxidation studies performed by TEM- and SEM-investigations of oxidized borosilicon carbonitride grains reveal that an interlayer consisting of B, N, and only little O is formed between the oxide scale on the surface and the inner bulk material. The interlayer does not disappear at temperatures above 1450°C in contrast to the Si2N20-interiayer observed on oxidized silicon nitride. The oxidation kinetics of the new ceramics are established in the range from 1000°C to 1600°C indicating a very high oxidation resistance. Possible applications as matrix materials as well as materials for fibers and coatings are discussed.


Author(s):  
Dancheng Zhu ◽  
Haibo Shu ◽  
Feng Jiang ◽  
Danhui Lv ◽  
Vijayshankar Asokan ◽  
...  

Author(s):  
Shiro Fujishiro ◽  
Harold L. Gegel

Ordered-alpha titanium alloys having a DO19 type structure have good potential for high temperature (600°C) applications, due to the thermal stability of the ordered phase and the inherent resistance to recrystallization of these alloys. Five different Ti-Al-Ga alloys consisting of equal atomic percents of aluminum and gallium solute additions up to the stoichiometric composition, Ti3(Al, Ga), were used to study the growth kinetics of the ordered phase and the nature of its interface.The alloys were homogenized in the beta region in a vacuum of about 5×10-7 torr, furnace cooled; reheated in air to 50°C below the alpha transus for hot working. The alloys were subsequently acid cleaned, annealed in vacuo, and cold rolled to about. 050 inch prior to additional homogenization


2001 ◽  
Vol 11 (PR3) ◽  
pp. Pr3-577-Pr3-584 ◽  
Author(s):  
A. Devi ◽  
H. Parala ◽  
W. Rogge ◽  
A. Wohlfart ◽  
A. Birkner ◽  
...  

1998 ◽  
Vol 536 ◽  
Author(s):  
E. M. Wong ◽  
J. E. Bonevich ◽  
P. C. Searson

AbstractColloidal chemistry techniques were used to synthesize ZnO particles in the nanometer size regime. The particle aging kinetics were determined by monitoring the optical band edge absorption and using the effective mass model to approximate the particle size as a function of time. We show that the growth kinetics of the ZnO particles follow the Lifshitz, Slyozov, Wagner theory for Ostwald ripening. In this model, the higher curvature and hence chemical potential of smaller particles provides a driving force for dissolution. The larger particles continue to grow by diffusion limited transport of species dissolved in solution. Thin films were fabricated by constant current electrophoretic deposition (EPD) of the ZnO quantum particles from these colloidal suspensions. All the films exhibited a blue shift relative to the characteristic green emission associated with bulk ZnO. The optical characteristics of the particles in the colloidal suspensions were found to translate to the films.


2016 ◽  
Vol 58 (5) ◽  
pp. 418-421
Author(s):  
Fatma Ünal ◽  
Ahmet Topuz

RSC Advances ◽  
2021 ◽  
Vol 11 (30) ◽  
pp. 18493-18499
Author(s):  
Sergio Sánchez-Martín ◽  
S. M. Olaizola ◽  
E. Castaño ◽  
E. Urionabarrenetxea ◽  
G. G. Mandayo ◽  
...  

Impact of deposition parameters, microstructure and growth kinetics analysis of ZnO grown by Aerosol-assisted Chemical Vapor Deposition (AACVD).


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