HF Etchant Solutions in Supercritical Carbon Dioxide for “Dry” Etch Processing of Microelectronic Devices

Charles A. Jones; Dongxing Yang; Eugene A. Irene; Stephen M. Gross; Mark Wagner; James DeYoung; Joseph M. DeSimone

doi:10.1021/cm034235w

HF Etchant Solutions in Supercritical Carbon Dioxide for “Dry” Etch Processing of Microelectronic Devices

Chemistry of Materials ◽

10.1021/cm034235w ◽

2003 ◽

Vol 15 (15) ◽

pp. 2867-2869 ◽

Cited By ~ 16

Author(s):

Charles A. Jones ◽

Dongxing Yang ◽

Eugene A. Irene ◽

Stephen M. Gross ◽

Mark Wagner ◽

...

Keyword(s):

Carbon Dioxide ◽

Supercritical Carbon Dioxide ◽

Microelectronic Devices ◽

Dry Etch ◽

Supercritical Carbon

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Improved etching method for microelectronic devices with supercritical carbon dioxide

Microelectronic Engineering ◽

10.1016/j.mee.2008.10.003 ◽

2009 ◽

Vol 86 (2) ◽

pp. 128-131 ◽

Cited By ~ 7

Author(s):

Jae Hyun Bae ◽

Md. Zahangir Alam ◽

Jae Mok Jung ◽

Yeong-Soon Gal ◽

Hyosan Lee ◽

...

Keyword(s):

Carbon Dioxide ◽

Supercritical Carbon Dioxide ◽

Microelectronic Devices ◽

Etching Method ◽

Supercritical Carbon

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Spectroscopic ellipsometry analysis of nanoporous low dielectric constant films processed via supercritical carbon dioxide for next-generation microelectronic devices

10.32469/10355/4879 ◽

2007 ◽

Author(s):

Maslin Othman

Keyword(s):

Carbon Dioxide ◽

Dielectric Constant ◽

Supercritical Carbon Dioxide ◽

Spectroscopic Ellipsometry ◽

Low Dielectric Constant ◽

Next Generation ◽

Low Dielectric ◽

Microelectronic Devices ◽

Supercritical Carbon

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Comparison of Extraction Efficiency of Tanshinones from S. miltiorrhiza by Solvent and Supercritical Carbon Dioxide

International Journal of Food Processing Technology ◽

10.15379/2408-9826.2016.03.01.01 ◽

2016 ◽

Vol 3 (1) ◽

pp. 1-10 ◽

Cited By ~ 3

Author(s):

Bing-Huei Chen ◽

◽

Wei-Der Lee

Keyword(s):

Carbon Dioxide ◽

Supercritical Carbon Dioxide ◽

Extraction Efficiency ◽

Supercritical Carbon

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Automatic extraction system for pesticide residues in food using supercritical carbon dioxide

Journal of Pesticide Science ◽

10.1584/jpestics.32.334 ◽

2007 ◽

Vol 32 (3) ◽

pp. 334-336

Author(s):

Yoshiteru Horikawa

Keyword(s):

Carbon Dioxide ◽

Supercritical Carbon Dioxide ◽

Pesticide Residues ◽

Extraction System ◽

Automatic Extraction ◽

Supercritical Carbon

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Analysis on Optimal Configuration of Air-Foil Shaped Printed Circuit Heat Exchanger in Supercritical Carbon Dioxide Power Cycle

Proceedings of the 15th International Heat Transfer Conference ◽

10.1615/ihtc15.hte.009931 ◽

2014 ◽

Author(s):

Sung Ho Yoon ◽

Jin Gyu Kwon ◽

Tae Ho Kim ◽

Hyun Sun Park ◽

Moo Hwan Kim

Keyword(s):

Carbon Dioxide ◽

Heat Exchanger ◽

Supercritical Carbon Dioxide ◽

Optimal Configuration ◽

Power Cycle ◽

Printed Circuit ◽

Supercritical Carbon

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EXPERIMENTAL INVESTIGATION OF SUPERCRITICAL CARBON DIOXIDE IN HORIZONTAL MICRO PIN ARRAYS WITH NON-UNIFORM HEAT FLUX BOUNDARY CONDITIONS

10.1615/tfec2019.fnd.027547 ◽

2019 ◽

Cited By ~ 1

Author(s):

Saad A. Jajja ◽

Jessa M. Sequeira ◽

Brian M. Fronk

Keyword(s):

Carbon Dioxide ◽

Heat Flux ◽

Experimental Investigation ◽

Supercritical Carbon Dioxide ◽

Boundary Conditions ◽

Uniform Heat Flux ◽

Uniform Heat ◽

Flux Boundary Conditions ◽

Supercritical Carbon

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INVESTIGATION OF CORRELATION FOR FORCED CONVECTIVE HEAT TRANSFER TO SUPERCRITICAL CARBON DIOXIDE FLOWING IN A VERTICAL TUBE

10.1615/tfec2017.htm.018515 ◽

2017 ◽

Author(s):

Lang Xuemei ◽

Liu Shenghui ◽

Huang Yanping ◽

Liu Guangxu ◽

Wang Junfeng

Keyword(s):

Heat Transfer ◽

Carbon Dioxide ◽

Supercritical Carbon Dioxide ◽

Convective Heat Transfer ◽

Convective Heat ◽

Vertical Tube ◽

Forced Convective Heat Transfer ◽

Supercritical Carbon

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The decellularization of allografts with supercritical carbon dioxide and detergents. Experimental data

The Bulletin of Bakoulev Center Cardiovascular Diseases ◽

10.24022/1810-0694-2019-20-5-402-409 ◽

2019 ◽

Vol 20 (5) ◽

pp. 402-409 ◽

Cited By ~ 1

Author(s):

D.V. Britikov ◽

I.S. Chashchin ◽

G.A. Khugaev ◽

N.P. Bakuleva

Keyword(s):

Experimental Data ◽

Carbon Dioxide ◽

Supercritical Carbon Dioxide ◽

Supercritical Carbon

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SUPERCRITICAL CARBON DIOXIDE BRAYTON CYCLES ANALYSIS FOR HIGH CONCENTRATION LINEAR FRESNEL COLLECTOR APPLICATIONS

10.26678/abcm.encit2020.cit20-0500 ◽

2020 ◽

Author(s):

Ricardo Begrow ◽

Júlio Passos

Keyword(s):

Carbon Dioxide ◽

Supercritical Carbon Dioxide ◽

High Concentration ◽

Supercritical Carbon

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Copper Filling of Deep Submicrometer Trenches with Cobalt-Lined Barrier Metal Produced by High-Vacuum Magnetron Sputtering by Using supercritical Carbon Dioxide Method

Journal of the Vacuum Society of Japan ◽

10.3131/jvsj2.55.237 ◽

2012 ◽

Vol 55 (5) ◽

pp. 237-240

Author(s):

Yasunori OHNO ◽

Masatoshi ITOH ◽

Tomonori NUMAKAWA ◽

Kota KAMIUTTANAI ◽

Katsuto OTAKE ◽

...

Keyword(s):

Carbon Dioxide ◽

Supercritical Carbon Dioxide ◽

Magnetron Sputtering ◽

High Vacuum ◽

Deep Submicrometer ◽

Barrier Metal ◽

Supercritical Carbon

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