Infrared spectroscopic study of thin films of poly(methylsilane), its oxidation, and its transformation into poly(carbosilane) on the surfaces of silicon single-crystal wafers
1998 ◽
Vol 456
(1-2)
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pp. 113-120
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2002 ◽
Vol 165
(1)
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pp. 42-47
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2019 ◽
Vol 101
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pp. 52-63
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2004 ◽
Vol 22
(6)
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pp. 2392-2397
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2002 ◽
Vol 203
(5-6)
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pp. 791-800
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Keyword(s):
1988 ◽
Vol 23
(3)
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pp. 1090-1097
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Keyword(s):
Keyword(s):
Keyword(s):