Solution and Solid-State NMR Characterization of Ethylene Oxide—Propylene Oxide Composites for Ultra-Low Dielectric Constant Applications

2002 ◽  
pp. 22-31
Author(s):  
Peter A. Mirau ◽  
Shu Yang
Keyword(s):  
Dielectric Constant ◽  
Solid State ◽  
Ethylene Oxide ◽  
Propylene Oxide ◽  
Solid State Nmr ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Nmr Characterization ◽  
Oxide Composites

Spin-coated and PECVD low dielectric constant porous organosilicate films studied by 1D and 2D solid-state NMR

2009 ◽  
Vol 11 (42) ◽  
pp. 9729 ◽  
Author(s):  
Guillaume Gerbaud ◽  
Sabine Hediger ◽  
Michel Bardet ◽  
Laurent Favennec ◽  
Aziz Zenasni ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Solid State ◽  
Solid State Nmr ◽  
Low Dielectric Constant ◽  
Low Dielectric

Deposition and Characterization of Low-Dielectric-Constant SiOC(-H) Thin Films for Interlayer Dielectrics in Multilevel Interconnections

2007 ◽  
Vol 50 (6) ◽  
pp. 1803 ◽  
Author(s):  
Rangaswamy Navamathavan ◽  
An Soo Jung ◽  
Hyun Seung Kim ◽  
Young Jun Jang ◽  
Chi Kyu Choi ◽  
...  
Keyword(s):  
Thin Films ◽  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Interlayer Dielectrics ◽  
Low Dielectric
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