Visible light-induced photocatalytic properties of WO3 films deposited by dc reactive magnetron sputtering

2012 ◽  
Vol 30 (3) ◽  
pp. 031503 ◽  
Author(s):  
Masahiro Imai ◽  
Maiko Kikuchi ◽  
Nobuto Oka ◽  
Yuzo Shigesato
Keyword(s):  
Magnetron Sputtering ◽  
Visible Light ◽  
Reactive Magnetron Sputtering ◽  
Photocatalytic Properties ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering

Growth of CrNx films by DC reactive magnetron sputtering at constant N2/Ar gas flow

2006 ◽  
Vol 200 (20-21) ◽  
pp. 6047-6053 ◽  
Author(s):  
E. Forniés ◽  
R. Escobar Galindo ◽  
O. Sánchez ◽  
J.M. Albella
Keyword(s):  
Magnetron Sputtering ◽  
Gas Flow ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Ar Gas

Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering

2021 ◽  
Author(s):  
Wuttichai Phae-ngam ◽  
Tossaporn Lertvanithphol ◽  
Chanunthorn Chananonnawathorn ◽  
Rattanachai Kowong ◽  
Mati Horprathum ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Temperature Deposition
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