scholarly journals Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping

2012 ◽  
Vol 4 (7) ◽  
pp. 3471-3475 ◽  
Author(s):  
Jui-Fen Chien ◽  
Ching-Hsiang Chen ◽  
Jing-Jong Shyue ◽  
Miin-Jang Chen
Keyword(s):  
Thin Films ◽  
Electronic Structures ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Electrical Characteristics ◽  
Remote Plasma ◽  
Nitrogen Doped ◽  
Doped Zno

Growth of nitrogen-doped p-type ZnO thin films prepared by atomic layer epitaxy

Rare Metals ◽  
2006 ◽  
Vol 25 (6) ◽  
pp. 110-114 ◽  
Author(s):  
C LEE ◽  
J LIM ◽  
S PARK ◽  
H KIM
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Zno Thin Films ◽  
Nitrogen Doped ◽  
P Type

Preparation of boron-doped ZnO thin films by photo-atomic layer deposition

2001 ◽  
Vol 65 (1-4) ◽  
pp. 125-132 ◽  
Author(s):  
Y. Yamamoto ◽  
K. Saito ◽  
K. Takahashi ◽  
M. Konagai
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Boron Doped ◽  
Layer Deposition ◽  
Doped Zno

Studies on morphology, electrical and optical characteristics of Al-doped ZnO thin films grown by atomic layer deposition

2018 ◽  
Vol 39 (3) ◽  
pp. 033004 ◽  
Author(s):  
Li Chen ◽  
Xinliang Chen ◽  
Zhongxin Zhou ◽  
Sheng Guo ◽  
Ying Zhao ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Optical Characteristics ◽  
Zno Thin Films ◽  
Layer Deposition ◽  
Doped Zno

Columnar nitrogen-doped ZnO nanostructured thin films obtained through atomic layer deposition

2021 ◽  
Author(s):  
Jorge Rodríguez-López ◽  
RICARDO RANGEL ◽  
Antonio Ramos ◽  
Dainet Berman ◽  
Patricia Quintana-Owen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Nitrogen Doped ◽  
Nanostructured Thin Films ◽  
Layer Deposition ◽  
Doped Zno

Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition

2012 ◽  
Vol 30 (2) ◽  
pp. 021202 ◽  
Author(s):  
Tara Dhakal ◽  
Daniel Vanhart ◽  
Rachel Christian ◽  
Abhishek Nandur ◽  
Anju Sharma ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Growth Morphology ◽  
Layer Deposition ◽  
Doped Zno
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