Seven at One Blow: Particle Cluster Stability in a Single Plasmonic Trap on a Silicon Waveguide

ACS Photonics ◽  
2020 ◽  
Vol 7 (8) ◽  
pp. 1942-1949
Author(s):  
Christophe Pin ◽  
Giovanni Magno ◽  
Aurore Ecarnot ◽  
Emmanuel Picard ◽  
Emmanuel Hadji ◽  
...  
Author(s):  
Wayne Zhao ◽  
Liem Do Thanh ◽  
Michael Gribelyuk ◽  
Mary-Ann Zaitz ◽  
Wing Lai

Abstract Inclusion of cerium (Ce) oxide particles as an abrasive into chemical mechanical planarization (CMP) slurries has become popular for wafer fabs below the 45nm technology node due to better polishing quality and improved CMP selectivity. Transmission electron microscopy (TEM) has difficulties finding and identifying Ce-oxide residuals due to the limited region of analysis unless dedicated efforts to search for them are employed. This article presents a case study that proved the concept in which physical evidence of Ce-rich particles was directly identified by analytical TEM during a CMP tool qualification in the early stage of 20nm node technology development. This justifies the need to setup in-fab monitoring for trace amounts of CMP residuals in Si-based wafer foundries. The fact that Cr resided right above the Ce-O particle cluster, further proved that the Ce-O particles were from the wafer and not introduced during the sample preparation.


1988 ◽  
Vol 24 (6) ◽  
pp. 303 ◽  
Author(s):  
P.D. Colbourne ◽  
P.E. Jessop

2021 ◽  
Author(s):  
Han Ye ◽  
Yanrong Wang ◽  
Shuhe Zhang ◽  
Danshi Wang ◽  
Yumin Liu ◽  
...  

Precise manipulation of mode order in silicon waveguide plays a fundamental role in the on-chip all-optical interconnections and is still a tough task in design when the functional region is...


2021 ◽  
Vol 7 (5) ◽  
pp. 82
Author(s):  
River Gassen ◽  
Dennis Thompkins ◽  
Austin Routt ◽  
Philippe Jones ◽  
Meghan Smith ◽  
...  

Magnetic particles have been evaluated for their biomedical applications as a drug delivery system to treat asthma and other lung diseases. In this study, ferromagnetic barium hexaferrite (BaFe12O19) and iron oxide (Fe3O4) particles were suspended in water or glycerol, as glycerol can be 1000 times more viscous than water. The particle concentration was 2.50 mg/mL for BaFe12O19 particle clusters and 1.00 mg/mL for Fe3O4 particle clusters. The magnetic particle cluster cross-sectional area ranged from 15 to 1000 μμm2, and the particle cluster diameter ranged from 5 to 45 μμm. The magnetic particle clusters were exposed to oscillating or rotating magnetic fields and imaged with an optical microscope. The oscillation frequency of the applied magnetic fields, which was created by homemade wire spools inserted into an optical microscope, ranged from 10 to 180 Hz. The magnetic field magnitudes varied from 0.25 to 9 mT. The minimum magnetic field required for particle cluster rotation or oscillation in glycerol was experimentally measured at different frequencies. The results are in qualitative agreement with a simplified model for single-domain magnetic particles, with an average deviation from the model of 1.7 ± 1.3. The observed difference may be accounted for by the fact that our simplified model does not include effects on particle cluster motion caused by randomly oriented domains in multi-domain magnetic particle clusters, irregular particle cluster size, or magnetic anisotropy, among other effects.


2021 ◽  
Vol 33 (11) ◽  
pp. 2170079
Author(s):  
Mingze He ◽  
Sami I. Halimi ◽  
Thomas G. Folland ◽  
Sai S. Sunku ◽  
Song Liu ◽  
...  
Keyword(s):  
Near Ir ◽  

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