Field-Effect Device Using Quasi-Two-Dimensional Electron Gas in Mass-Producible Atomic-Layer-Deposited Al2O3/TiO2 Ultrathin (<10 nm) Film Heterostructures

Tae Jun Seok; Yuhang Liu; Hae Jun Jung; Soo Bin Kim; Dae Hyun Kim; Sung Min Kim; Jae Hyuck Jang; Deok-Yong Cho; Sang Woon Lee; Tae Joo Park

doi:10.1021/acsnano.8b05891

Field-Effect Device Using Quasi-Two-Dimensional Electron Gas in Mass-Producible Atomic-Layer-Deposited Al2O3/TiO2 Ultrathin (<10 nm) Film Heterostructures

ACS Nano ◽

10.1021/acsnano.8b05891 ◽

2018 ◽

Vol 12 (10) ◽

pp. 10403-10409 ◽

Cited By ~ 16

Author(s):

Tae Jun Seok ◽

Yuhang Liu ◽

Hae Jun Jung ◽

Soo Bin Kim ◽

Dae Hyun Kim ◽

...

Keyword(s):

Field Effect ◽

Electron Gas ◽

Atomic Layer ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Dimensional Electron Gas

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Field-effect-induced two-dimensional electron gas utilizing modulation-doped ohmic contacts

Solid State Communications ◽

10.1016/j.ssc.2014.08.011 ◽

2014 ◽

Vol 197 ◽

pp. 20-24 ◽

Cited By ~ 3

Author(s):

Sumit Mondal ◽

Geoffrey C. Gardner ◽

John D. Watson ◽

Saeed Fallahi ◽

Amir Yacoby ◽

...

Keyword(s):

Field Effect ◽

Ohmic Contacts ◽

Electron Gas ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Dimensional Electron Gas

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Impact of dopants in GaN on the formation of two-dimensional electron gas in AlGaN/GaN heterostructure field-effect transistors

Applied Physics A ◽

10.1007/s003390100978 ◽

2002 ◽

Vol 75 (3) ◽

pp. 387-389 ◽

Cited By ~ 3

Author(s):

R.M. Chu ◽

Y.D. Zheng ◽

Y.G. Zhou ◽

P. Han ◽

B. Shen ◽

...

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Electron Gas ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Heterostructure Field Effect Transistors ◽

Dimensional Electron Gas ◽

Gan Heterostructure

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Tailoring of Two-dimensional Electron Gas Density in Thin Film Oxide Heterostructure via Atomic Layer Deposition

Proceedings of the 5th World Congress on New Technologies ◽

10.11159/icnfa19.135 ◽

2019 ◽

Author(s):

Seong Hwan Kim ◽

Hye Ju Kim ◽

Sang Woon Lee

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Electron Gas ◽

Atomic Layer ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Layer Deposition ◽

Dimensional Electron Gas ◽

Oxide Heterostructure

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Creation and Control of Two-Dimensional Electron Gas Using Al-Based Amorphous Oxides/SrTiO3 Heterostructures Grown by Atomic Layer Deposition

Nano Letters ◽

10.1021/nl302214x ◽

2012 ◽

Vol 12 (9) ◽

pp. 4775-4783 ◽

Cited By ~ 109

Author(s):

Sang Woon Lee ◽

Yiqun Liu ◽

Jaeyeong Heo ◽

Roy G. Gordon

Keyword(s):

Atomic Layer Deposition ◽

Electron Gas ◽

Atomic Layer ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Amorphous Oxides ◽

Layer Deposition ◽

Dimensional Electron Gas ◽

And Control

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The ferroelectric field effect on the two-dimensional electron gas at LaAlO3/SrTiO3 (001) interface: Insights from first principle simulations

Physica E Low-dimensional Systems and Nanostructures ◽

10.1016/j.physe.2016.01.029 ◽

2016 ◽

Vol 80 ◽

pp. 195-201 ◽

Cited By ~ 2

Author(s):

Yu-Qiang Gao ◽

Pan Li ◽

Nan Wang ◽

Hui Xing ◽

Chang-Le Chen

Keyword(s):

Field Effect ◽

Electron Gas ◽

First Principle ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Dimensional Electron Gas

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Ga0.51In0.49P/GaxIn1-xAs lattice-matched (x=1) and strained (x=0.85) two-dimensional electron gas field-effect transistors

Semiconductor Science and Technology ◽

10.1088/0268-1242/6/2/006 ◽

1991 ◽

Vol 6 (2) ◽

pp. 103-107 ◽

Cited By ~ 21

Author(s):

M Razeghi ◽

F Omnes ◽

P Maurel ◽

Y J Chan ◽

D Pavlidis

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Electron Gas ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Gas Field ◽

Dimensional Electron Gas ◽

Lattice Matched

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Optical control of the two-dimensional electron-gas density in single asymmetric quantum wells: Magnetic-field effect

Physical Review B ◽

10.1103/physrevb.60.4501 ◽

1999 ◽

Vol 60 (7) ◽

pp. 4501-4504 ◽

Cited By ~ 12

Author(s):

A. J. C. Cardoso ◽

Fanyao Qu ◽

P. C. Morais

Keyword(s):

Quantum Wells ◽

Field Effect ◽

Electron Gas ◽

Magnetic Field Effect ◽

Optical Control ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Asymmetric Quantum ◽

Dimensional Electron Gas

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Subbands and charge control in a two‐dimensional electron gas field‐effect transistor

Applied Physics Letters ◽

10.1063/1.94734 ◽

1984 ◽

Vol 44 (3) ◽

pp. 307-309 ◽

Cited By ~ 116

Author(s):

B. Vinter

Keyword(s):

Field Effect ◽

Field Effect Transistor ◽

Electron Gas ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Gas Field ◽

Charge Control ◽

Effect Transistor ◽

Dimensional Electron Gas

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Selectively δ‐doped AlxGa1−xAs/GaAs heterostructures with high two‐dimensional electron‐gas concentrationsn2DEG≥1.5×1012cm−2for field‐effect transistors

Applied Physics Letters ◽

10.1063/1.98722 ◽

1987 ◽

Vol 51 (15) ◽

pp. 1170-1172 ◽

Cited By ~ 73

Author(s):

E. F. Schubert ◽

J. E. Cunningham ◽

W. T. Tsang ◽

G. L. Timp

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Electron Gas ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Dimensional Electron Gas

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Effect of shallow and deep donors on the equilibrium electron density of the two-dimensional electron gas in a modulation-doped field-effect transistor

IEEE Transactions on Electron Devices ◽

10.1109/t-ed.1986.22555 ◽

1986 ◽

Vol 33 (5) ◽

pp. 707-711 ◽

Cited By ~ 12

Author(s):

S. Subramanian ◽

A.S. Vengurlekar ◽

A.A. Diwan

Keyword(s):

Electron Density ◽

Field Effect ◽

Field Effect Transistor ◽

Electron Gas ◽

Two Dimensional ◽

Dimensional Electron ◽

Two Dimensional Electron Gas ◽

Effect Transistor ◽

Dimensional Electron Gas

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