Oxygen-Promoted Chemical Vapor Deposition of Graphene on Copper: A Combined Modeling and Experimental Study

ACS Nano ◽  
2018 ◽  
Vol 12 (9) ◽  
pp. 9372-9380 ◽  
Author(s):  
Bharathi Madurai Srinivasan ◽  
Yufeng Hao ◽  
Ramanarayan Hariharaputran ◽  
Shanti Rywkin ◽  
James C. Hone ◽  
...  
Keyword(s):  
Experimental Study ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor

Experimental study on the generation of carbonaceous dust formed by chemical vapor deposition in HTGR

2018 ◽  
Vol 335 ◽  
pp. 172-177 ◽  
Author(s):  
Yingchao Meng ◽  
Huaqiang Yin ◽  
Malin Liu ◽  
Tao Ma ◽  
Shengyao Jiang
Keyword(s):  
Experimental Study ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor

Influence of Growth Temperature on Site Competition Effects during Chemical Vapor Deposition of 4H-SiC Layers

2017 ◽  
Vol 897 ◽  
pp. 79-82
Author(s):  
Marcin Zielinski ◽  
Thierry Chassagne ◽  
Roxana Arvinte ◽  
Adrien Michon ◽  
Marc Portail ◽  
...  
Keyword(s):  
Experimental Study ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Thermal Evolution ◽  
Chemical Vapor ◽  
Partial Explanation ◽  
Competition Effects ◽  
N Incorporation ◽  
Site Competition ◽  
Growth Experiments

After presenting an exhaustive experimental study of aluminum incorporation in epitaxial 4H-SiC and 3CSiC films grown by chemical vapor deposition (CVD), we focalize once more on what is called site competition effects. We observed that the influence of C/Si ratio on dopant (Al, N) incorporation in SiC was qualitatively different depending on whether the growth experiments were performed in “low temperature” (LT) or “high temperature” (HT) regime. Partial explanation of observed phenomena basing on thermal evolution of carbon coverage of SiC surface is proposed.

scholarly journals Experimental study of the chemical vapor deposition from CH3SiHCl2/H2: Application to the synthesis of monolithic SiC tubes

2013 ◽  
Vol 230 ◽  
pp. 137-144 ◽  
Author(s):  
P. Drieux ◽  
G. Chollon ◽  
S. Jacques ◽  
A. Allemand ◽  
D. Cavagnat ◽  
...  
Keyword(s):  
Experimental Study ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor
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