Atmospheric-Pressure Synthesis of Atomically Smooth, Conformal, and Ultrathin Low-k Polymer Insulating Layers by Plasma-Initiated Chemical Vapor Deposition
2019 ◽
Vol 1
(12)
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pp. 3304-3312
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2014 ◽
Vol 244
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pp. 98-108
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2014 ◽
Vol 6
(21)
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pp. 18418-18422
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2014 ◽
Vol 12
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pp. 66-74
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2018 ◽
Vol 15
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pp. 1800027
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1995 ◽
Vol 24
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pp. 761-766
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