Atomic Layer Deposition and Patterning of 15–185 nm Thick Al2O3 Films with Microplasma Arrays for Low-Temperature Growth and Sub-300 nm Lateral Feature Resolution

2020 ◽  
Vol 3 (5) ◽  
pp. 4025-4036
Author(s):  
Jinhong Kim ◽  
Andrey E. Mironov ◽  
Sung-jin Park ◽  
J. Gary Eden
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition ◽  
Feature Resolution ◽  
Al2o3 Films

scholarly journals Extra-Low Temperature Growth of ZnO by Atomic Layer Deposition with Diethylzinc Precursor

2007 ◽  
Vol 112 (2) ◽  
pp. 401-406 ◽  
Author(s):  
I.A. Kowalik ◽  
E. Guziewicz ◽  
K. Kopalko ◽  
S. Yatsunenko ◽  
M. Godlewski ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

scholarly journals Low-temperature growth of AlN thin films by plasma-enhanced atomic layer deposition

2013 ◽  
Vol 62 (11) ◽  
pp. 117302
Author(s):  
Feng Jia-Heng ◽  
Tang Li-Dan ◽  
Liu Bang-Wu ◽  
Xia Yang ◽  
Wang Bing
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

Extra-Low Temperature Growth of ZnO Thin Films by Atomic Layer Deposition

2008 ◽  
Vol 53 (9(5)) ◽  
pp. 2880-2883 ◽  
Author(s):  
E. Guziewicz ◽  
M. Godlewski ◽  
K. Kopalko ◽  
I. A. Kowalik ◽  
S. Yatsunenko ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Layer Deposition

Low Temperature Growth of High Purity, Low Resistivity Copper Films by Atomic Layer Deposition

2011 ◽  
Vol 23 (20) ◽  
pp. 4417-4419 ◽  
Author(s):  
Thomas J. Knisley ◽  
Thiloka C. Ariyasena ◽  
Timo Sajavaara ◽  
Mark J. Saly ◽  
Charles H. Winter
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
High Purity ◽  
Atomic Layer ◽  
Copper Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Low Resistivity ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document