scholarly journals Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies

2018 ◽  
Vol 10 (15) ◽  
pp. 13158-13180 ◽  
Author(s):  
Tahsin Faraz ◽  
Harm C. M. Knoops ◽  
Marcel A. Verheijen ◽  
Cristian A. A. van Helvoirt ◽  
Saurabh Karwal ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Material Properties ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Low temperature silicon dioxide by thermal atomic layer deposition: Investigation of material properties

2010 ◽  
Vol 107 (6) ◽  
pp. 064314 ◽  
Author(s):  
D. Hiller ◽  
R. Zierold ◽  
J. Bachmann ◽  
M. Alexe ◽  
Y. Yang ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Silicon Dioxide ◽  
Material Properties ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties

2019 ◽  
Vol 28 (2) ◽  
pp. 024002 ◽  
Author(s):  
Tahsin Faraz ◽  
Karsten Arts ◽  
Saurabh Karwal ◽  
Harm C M Knoops ◽  
Wilhelmus M M Kessels
Keyword(s):  
Atomic Layer Deposition ◽  
Material Properties ◽  
Atomic Layer ◽  
Energetic Ions ◽  
Layer Deposition

Process and Material Properties of HfLaO[sub x] Prepared by Atomic Layer Deposition

2008 ◽  
Vol 155 (10) ◽  
pp. G189 ◽  
Author(s):  
Wei He ◽  
Daniel S. H. Chan ◽  
Sun-Jung Kim ◽  
Young-Sun Kim ◽  
Sung-Tae Kim ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Material Properties ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

2018 ◽  
Vol 36 (1) ◽  
pp. 01A109 ◽  
Author(s):  
Julian Pilz ◽  
Alberto Perrotta ◽  
Paul Christian ◽  
Martin Tazreiter ◽  
Roland Resel ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Material Properties ◽  
Room Temperature ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Layer Deposition
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