Low Temperature Deposition of High-k/Metal Gate Stacks on High-Sn Content (Si)GeSn-Alloys

C. Schulte-Braucks; N. von den Driesch; S. Glass; A. T. Tiedemann; U. Breuer; A. Besmehn; J.-M. Hartmann; Z. Ikonic; Q. T. Zhao; S. Mantl; D. Buca

doi:10.1021/acsami.6b02425

Low Temperature Deposition of High-k/Metal Gate Stacks on High-Sn Content (Si)GeSn-Alloys

ACS Applied Materials & Interfaces ◽

10.1021/acsami.6b02425 ◽

2016 ◽

Vol 8 (20) ◽

pp. 13133-13139 ◽

Cited By ~ 13

Author(s):

C. Schulte-Braucks ◽

N. von den Driesch ◽

S. Glass ◽

A. T. Tiedemann ◽

U. Breuer ◽

...

Keyword(s):

Low Temperature ◽

Gate Stacks ◽

Metal Gate ◽

Low Temperature Deposition ◽

High K ◽

Temperature Deposition

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Low-Temperature Microwave Annealing for MOSFETs With High-k/Metal Gate Stacks

IEEE Electron Device Letters ◽

10.1109/led.2013.2279396 ◽

2013 ◽

Vol 34 (10) ◽

pp. 1286-1288 ◽

Cited By ~ 10

Author(s):

Yao-Jen Lee ◽

Bo-An Tsai ◽

Chiung-Hui Lai ◽

Zheng-Yao Chen ◽

Fu-Kuo Hsueh ◽

...

Keyword(s):

Low Temperature ◽

Gate Stacks ◽

Metal Gate ◽

Microwave Annealing ◽

High K

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High-K metal gate stacks with ultra-thin interfacial layers formed by low temperature microwave-based plasma oxidation

Microelectronic Engineering ◽

10.1016/j.mee.2017.05.041 ◽

2017 ◽

Vol 178 ◽

pp. 262-265 ◽

Cited By ~ 1

Author(s):

M. Czernohorsky ◽

K. Seidel ◽

K. Kühnel ◽

J. Niess ◽

N. Sacher ◽

...

Keyword(s):

Low Temperature ◽

Plasma Oxidation ◽

Gate Stacks ◽

Metal Gate ◽

Interfacial Layers ◽

High K

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Interfacial layer optimization of high-k/metal gate stacks for low temperature processing

Microelectronic Engineering ◽

10.1016/j.mee.2009.03.058 ◽

2009 ◽

Vol 86 (7-9) ◽

pp. 1632-1634 ◽

Cited By ~ 6

Author(s):

Barry P. Linder ◽

Vijay Narayanan ◽

Eduard A. Cartier

Keyword(s):

Low Temperature ◽

Interfacial Layer ◽

Gate Stacks ◽

Metal Gate ◽

High K ◽

Low Temperature Processing

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Fabrication of Chitosan-nanohydroxyapatite Scaffolds via Low-temperature Deposition Manufacturing

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2011.00012 ◽

2011 ◽

Vol 26 (1) ◽

pp. 12-16 ◽

Cited By ~ 6

Author(s):

Xiong-Fei ZHENG ◽

Wen-Jie ZHAI ◽

Ying-Chun LIANG ◽

Tao SUN

Keyword(s):

Low Temperature ◽

Low Temperature Deposition ◽

Temperature Deposition

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Low-temperature deposition of high-quality silicon dioxide films by sputtering-type electron cyclotron resonance plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580664 ◽

1997 ◽

Vol 15 (4) ◽

pp. 1951-1954 ◽

Cited By ~ 20

Author(s):

H. Nakashima ◽

K. Furukawa ◽

Y. C. Liu ◽

D. W. Gao ◽

Y. Kashiwazaki ◽

...

Keyword(s):

Low Temperature ◽

Silicon Dioxide ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

High Quality ◽

Electron Cyclotron Resonance Plasma ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Resonance Plasma

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Optimisation of HiPIMS photocatalytic titania coatings for low temperature deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2014.02.020 ◽

2014 ◽

Vol 250 ◽

pp. 7-13 ◽

Cited By ~ 22

Author(s):

M. Ratova ◽

G.T. West ◽

P.J. Kelly

Keyword(s):

Low Temperature ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Titania Coatings

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Tradeoff Between Hot Carrier and Negative Bias Temperature Degradations in High-Performance $\hbox{Si}_{1 - x}\hbox{Ge}_{x}$ pMOSFETs With High-$k$/Metal Gate Stacks

IEEE Electron Device Letters ◽

10.1109/led.2010.2071851 ◽

2010 ◽

Author(s):

Won-Ho Choi ◽

Chang-Young Kang ◽

Jung-Woo Oh ◽

Byoung-Hun Lee ◽

Prashant Majhi ◽

...

Keyword(s):

High Performance ◽

Negative Bias ◽

Gate Stacks ◽

Metal Gate ◽

Hot Carrier ◽

High K

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The effect of oxygen concentration on the low temperature deposition of TiO2 thin films

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.08.075 ◽

2008 ◽

Vol 202 (10) ◽

pp. 2126-2131 ◽

Cited By ~ 50

Author(s):

H. Toku ◽

R.S. Pessoa ◽

H.S. Maciel ◽

M. Massi ◽

U.A. Mengui

Keyword(s):

Thin Films ◽

Low Temperature ◽

Oxygen Concentration ◽

Tio2 Thin Films ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Effect Of Oxygen

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Biomimetic design and fabrication of multilayered osteochondral scaffolds by low-temperature deposition manufacturing and thermal-induced phase-separation techniques

Biofabrication ◽

10.1088/1758-5090/aa7078 ◽

2017 ◽

Vol 9 (2) ◽

pp. 025021 ◽

Cited By ~ 25

Author(s):

Ting Zhang ◽

Hefeng Zhang ◽

Laquan Zhang ◽

Shuaijun Jia ◽

Jian Liu ◽

...

Keyword(s):

Phase Separation ◽

Low Temperature ◽

Separation Techniques ◽

Biomimetic Design ◽

Low Temperature Deposition ◽

Temperature Deposition

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Low temperature deposition of BiFeO3 films on Ti foils for piezoelectric applications

Scripta Materialia ◽

10.1016/j.scriptamat.2021.114152 ◽

2021 ◽

Vol 204 ◽

pp. 114152

Author(s):

Jing Yan ◽

Jun Ouyang ◽

Hongbo Cheng ◽

Peng Yan

Keyword(s):

Low Temperature ◽

Low Temperature Deposition ◽

Temperature Deposition

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