Complementary Metal–Oxide–Semiconductor Compatible Deposition of Nanoscale Transition-Metal Nitride Thin Films for Plasmonic Applications
2004 ◽
Vol 22
(3)
◽
pp. 851
◽
2004 ◽
Vol 22
(1)
◽
pp. 175
◽
2002 ◽
Vol 41
(Part 2, No. 8B)
◽
pp. L919-L921
◽
2011 ◽
pp. n/a-n/a
◽