Fabrication of Sub-3 nm Feature Size Based on Block Copolymer Self-Assembly for Next-Generation Nanolithography
2019 ◽
Vol 11
(36)
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pp. 33364-33369
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2005 ◽
Vol 42
(3)
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pp. 180-183
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Keyword(s):
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2009 ◽
Vol 30
(12)
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pp. 1002-1008
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Keyword(s):