Harnessing Atomic Layer Deposition and Diffusion to Spatially Localize Rare-Earth Ion Emitters

Alban Ferrier; Nao Harada; Marion Scarafagio; Emrick Briand; Jean-Jacques Ganem; Ian Vickridge; Antoine Seyeux; Philippe Marcus; Diana Serrano; Philippe Goldner; Alexandre Tallaire

doi:10.1021/acs.jpcc.0c04019

Harnessing Atomic Layer Deposition and Diffusion to Spatially Localize Rare-Earth Ion Emitters

The Journal of Physical Chemistry C ◽

10.1021/acs.jpcc.0c04019 ◽

2020 ◽

Vol 124 (36) ◽

pp. 19725-19735

Author(s):

Alban Ferrier ◽

Nao Harada ◽

Marion Scarafagio ◽

Emrick Briand ◽

Jean-Jacques Ganem ◽

...

Keyword(s):

Rare Earth ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Rare Earth Ion ◽

Layer Deposition ◽

And Diffusion

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Atomic layer deposition of rare earth oxides: erbium oxide thin films from β-diketonate and ozone precursors

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2003.11.149 ◽

2004 ◽

Vol 374 (1-2) ◽

pp. 124-128 ◽

Cited By ~ 57

Author(s):

Jani Päiväsaari ◽

Matti Putkonen ◽

Timo Sajavaara ◽

Lauri Niinistö

Keyword(s):

Thin Films ◽

Rare Earth ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Rare Earth Oxides ◽

Erbium Oxide ◽

Oxide Thin Films ◽

Ozone Precursors ◽

Layer Deposition

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Growth mechanism and diffusion barrier property of plasma-enhanced atomic layer deposition Ti–Si–N thin films

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2198846 ◽

2006 ◽

Vol 24 (3) ◽

pp. 1327 ◽

Cited By ~ 16

Author(s):

Jin-Seong Park ◽

Sang-Won Kang ◽

H. Kim

Keyword(s):

Thin Films ◽

Atomic Layer Deposition ◽

Growth Mechanism ◽

Diffusion Barrier ◽

Atomic Layer ◽

Barrier Property ◽

Layer Deposition ◽

And Diffusion

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Atomic Layer Deposition as a New Method for Rare-Earth Doping of Optical Fibers

2007 Conference on Lasers and Electro-Optics (CLEO) ◽

10.1109/cleo.2007.4452928 ◽

2007 ◽

Cited By ~ 1

Author(s):

Lars Norin ◽

Evgeny Vanin ◽

Pekka Soininen ◽

Matti Putkonen

Keyword(s):

Rare Earth ◽

Atomic Layer Deposition ◽

Optical Fibers ◽

Atomic Layer ◽

New Method ◽

Rare Earth Doping ◽

Layer Deposition

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Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition

Chemistry of Materials ◽

10.1021/cm503659d ◽

2014 ◽

Vol 27 (1) ◽

pp. 148-156 ◽

Cited By ~ 73

Author(s):

Il-Kwon Oh ◽

Kangsik Kim ◽

Zonghoon Lee ◽

Kyung Yong Ko ◽

Chang-Wan Lee ◽

...

Keyword(s):

Rare Earth ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Rare Earth Oxides ◽

Layer Deposition

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Rare earth scandate thin films by atomic layer deposition: effect of the rare earth cation size

Journal of Materials Chemistry ◽

10.1039/c0jm00363h ◽

2010 ◽

Vol 20 (20) ◽

pp. 4207 ◽

Cited By ~ 27

Author(s):

Pia Myllymäki ◽

Martin Roeckerath ◽

Joao Marcelo Lopes ◽

Jürgen Schubert ◽

Kenichiro Mizohata ◽

...

Keyword(s):

Thin Films ◽

Rare Earth ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Rare Earth Cation ◽

Layer Deposition ◽

Earth Cation ◽

Deposition Effect ◽

Cation Size ◽

The Rare Earth

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Metal Exchange and Diffusion during Atomic Layer Deposition of Cobalt and Nickel Sulfides

Chemistry of Materials ◽

10.1021/acs.chemmater.1c03394 ◽

2021 ◽

Author(s):

Jiahao Zhu ◽

Ran Zhao ◽

Jianmin Shi ◽

Qingbo Wa ◽

Min Zhang ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Metal Exchange ◽

Layer Deposition ◽

And Diffusion ◽

Cobalt And Nickel

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Atomic layer deposition of rare-earth-based binary and ternary oxides for microelectronic applications

Semiconductor Science and Technology ◽

10.1088/0268-1242/27/7/074013 ◽

2012 ◽

Vol 27 (7) ◽

pp. 074013 ◽

Cited By ~ 27

Author(s):

C Wiemer ◽

L Lamagna ◽

M Fanciulli

Keyword(s):

Rare Earth ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Ternary Oxides

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Atomic Layer Deposition of Rare-earth Oxide Thin Films for High-k Dielectric Applications

ECS Meeting Abstracts ◽

10.1149/ma2009-01/19/821 ◽

2009 ◽

Keyword(s):

Thin Films ◽

Rare Earth ◽

Atomic Layer Deposition ◽

Rare Earth Oxide ◽

Atomic Layer ◽

Oxide Thin Films ◽

Layer Deposition ◽

High K ◽

High K Dielectric

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Atomic layer deposition on polymer based flexible packaging materials: Growth characteristics and diffusion barrier properties

Thin Solid Films ◽

10.1016/j.tsf.2010.12.171 ◽

2011 ◽

Vol 519 (10) ◽

pp. 3146-3154 ◽

Cited By ~ 43

Author(s):

Tommi O. Kääriäinen ◽

Philipp Maydannik ◽

David C. Cameron ◽

Kimmo Lahtinen ◽

Petri Johansson ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Diffusion Barrier ◽

Atomic Layer ◽

Barrier Properties ◽

Growth Characteristics ◽

Packaging Materials ◽

Layer Deposition ◽

Flexible Packaging ◽

And Diffusion

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(Invited) Rare Earth Doped Layers Fabricated By Atomic Layer Deposition

ECS Meeting Abstracts ◽

10.1149/ma2020-01161066mtgabs ◽

2020 ◽

Vol MA2020-01 (16) ◽

pp. 1066-1066

Author(s):

Larysa Khomenkova ◽

Aline Jolivet ◽

Christophe Labbé ◽

Xavier Portier ◽

Julien Cardin ◽

...

Keyword(s):

Rare Earth ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Rare Earth Doped

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