Birefringent and Complex Dielectric Functions of Monolayer WSe2 Derived by Spectroscopic Ellipsometer

2020 ◽  
Vol 124 (23) ◽  
pp. 12665-12671
Author(s):  
Yuhui Chu ◽  
Ziyang Zhang
Keyword(s):  
Spectroscopic Ellipsometer

Analysis of Paraffin Thin Film by Spectroscopic Ellipsometer

2021 ◽  
Vol 141 (4) ◽  
pp. 572-573
Author(s):  
Hiroshi Kumagai ◽  
Riho Iida ◽  
Tomohiro Kosuge ◽  
Takanobu Sato ◽  
Michio Suzuki ◽  
...  
Keyword(s):  
Thin Film ◽  
Spectroscopic Ellipsometer

Measure the Phase Retardation and Birefringence of the Mica Wave Plate Using the Spectroscopic Ellipsometer

2010 ◽  
Vol 39 (11) ◽  
pp. 2025-2030
Author(s):  
张旭 ZHANG Xu ◽  
吴福全 WU Fuquan ◽  
张霞 ZHANG Xia ◽  
郝殿中 HAO Dianzhong ◽  
亓丽梅 QI Limei
Keyword(s):  
Phase Retardation ◽  
Wave Plate ◽  
Spectroscopic Ellipsometer

Measurement of EUV absorber and resist CD using spectroscopic ellipsometer

2013 ◽  
Author(s):  
Kyung M. Lee ◽  
Malahat Tavassoli ◽  
Pei-yang Yan ◽  
Guojing Zhang
Keyword(s):  
Spectroscopic Ellipsometer

New purged UV spectroscopic ellipsometer to characterize thin films and multilayers at 157 nm

2000 ◽  
Author(s):  
Pierre Boher ◽  
Patrick Evrard ◽  
Jean-Philippe Piel ◽  
Jean-Louis P. Stehle
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometer

scholarly journals Error-reduced channeled spectroscopic ellipsometer with palm-size sensing head

2009 ◽  
Vol 80 (8) ◽  
pp. 083104 ◽  
Author(s):  
Hiroshi Okabe ◽  
Masayuki Hayakawa ◽  
Junichi Matoba ◽  
Hitoshi Naito ◽  
Kazuhiko Oka
Keyword(s):  
Spectroscopic Ellipsometer

Application of a Dual-spectral-range, Divergent-beam Spectroscopic Ellipsometer for High-Speed Mapping of Large-area, Laterally-inhomogeneous, Photovoltaic Multilayers

2011 ◽  
Vol 1323 ◽  
Author(s):  
M. Fried ◽  
G. Juhasz ◽  
C. Major ◽  
A. Nemeth ◽  
P. Petrik ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
High Speed ◽  
Detection System ◽  
Broad Band ◽  
Two Dimensions ◽  
Ex Situ ◽  
Small Aperture ◽  
Divergent Beam ◽  
Spectroscopic Ellipsometer ◽  
Line Image

ABSTRACTWe have developed a prototype spectroscopic ellipsometer for imaging/mapping purposes requiring only one measurement cycle (one rotation period of a polarizer or analyzer) for the acquisition of a two-dimensional array of data points. Our new measurement technique serves as a novel form of imaging ellipsometry, using a divergent (uncollimated, diffuse) source system and a detection system consisting of an angle-of-incidence-sensitive pinhole camera. By incorporating broad-band sources and wavelength dispersion optics, the instrument provides continuous high-resolution spectra along a line image of the sample surface. As a result, information on multilayer photovoltaics stacks can be obtained over large areas (several dm2) at high speed. The technique can be expanded to even larger areas by scaling-up the optical geometry. The spatial resolution of the line image is limited by the minimum resolved-angle as determined by the detection system. Small-aperture polarizers (25 mm diameter) are incorporated into the instrument, which reduces its cost. Demonstration mapping measurements have been performed ex situ on a multilayer sample deposited on a polymer substrate, including an intentionally graded 80-350 nm thick hydrogenated amorphous silicon (a-Si:H) layer and an intended uniform 400-500 nm thick transparent conducting ZnO:Al layer, both on opaque silver. Alternative commercial instruments for ex situ SE mapping must translate the sample in two dimensions. Even a 15 x 15 cm2 sample requires > 200 measurements with cm-resolution and at least 15 min. By collecting ex situ data in parallel along one dimension through imaging, the divergent-beam system can measure with similar spatial resolution in < 2 min. In situ measurements on both roll-to-roll polymer and rigid glass will be possible in the future.

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