scholarly journals Combined Spatially Resolved Optical Emission Imaging and Modeling Studies of Microwave-Activated H2/Ar and H2/Kr Plasmas Operating at Powers and Pressures Relevant for Diamond Chemical Vapor Deposition

2019 ◽  
Vol 123 (13) ◽  
pp. 2544-2558 ◽  
Author(s):  
Edward J. D. Mahoney ◽  
Sohail Mushtaq ◽  
Michael N. R. Ashfold ◽  
Yuri A. Mankelevich
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optical Emission ◽  
Spatially Resolved ◽  
Modeling Studies ◽  
Diamond Chemical Vapor Deposition

Investigation of optical emission spectroscopy in diamond chemical vapor deposition by Monte Carlo simulation

2008 ◽  
Vol 6 (3) ◽  
pp. 218-221
Author(s):  
王志军 Zhijun Wang ◽  
董丽芳 Lifang Dong ◽  
李盼来 Panlai Li ◽  
尚勇 Yong Shang ◽  
何寿杰 Shoujie He
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Chemical Vapor ◽  
Optical Emission ◽  
Diamond Chemical Vapor Deposition

Optical Emission from Microwave Activated C/H/O Gas Mixtures for Diamond Chemical Vapor Deposition

2012 ◽  
Vol 116 (38) ◽  
pp. 9447-9458 ◽  
Author(s):  
James C. Richley ◽  
Mark W. Kelly ◽  
Michael N. R. Ashfold ◽  
Yuri A. Mankelevich
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optical Emission ◽  
Gas Mixtures ◽  
Diamond Chemical Vapor Deposition
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