Influence of Substrate Orientation and Oxygen Partial Pressure on the Morphology, Structure, and Electrical Property of Epitaxial Indium Tin Oxide Films

Crystal Growth & Design ◽

10.1021/acs.cgd.1c00447 ◽

2021 ◽

Author(s):

Qiaonan Yu ◽

Gaige Huang ◽

Guoqiang Li

Keyword(s):

Electrical Property ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Substrate Orientation ◽

Influence Of Substrate ◽

Tin Oxide Films

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The influence of substrate temperature and sputtering gas atmosphere on the electrical properties of reactively sputtered indium tin oxide films

Thin Solid Films ◽

10.1016/0040-6090(86)90129-x ◽

1986 ◽

Vol 135 (2) ◽

pp. 219-228 ◽

Cited By ~ 17

Author(s):

Shozaburo Nishikawa

Keyword(s):

Electrical Properties ◽

Substrate Temperature ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Gas Atmosphere ◽

Influence Of Substrate ◽

Tin Oxide Films

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Role of the oxygen partial pressure on the properties of undoped tin oxide films deposited at low temperature

physica status solidi (a) ◽

10.1002/pssa.200778930 ◽

2008 ◽

Vol 205 (8) ◽

pp. 1957-1960

Author(s):

P. Parreira ◽

J. Valente ◽

G. Lavareda ◽

C. Nunes de Carvalho ◽

A. R. Ramos ◽

...

Keyword(s):

Low Temperature ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Tin Oxide ◽

Oxide Films ◽

Tin Oxide Films

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Effect of oxygen partial pressure on the microstructural and physical properties on nanocrystalline tin oxide films grown by plasma oxidation after thermal deposition from pure Sn targets

Vacuum ◽

10.1016/j.vacuum.2008.06.007 ◽

2008 ◽

Vol 83 (2) ◽

pp. 292-301 ◽

Cited By ~ 18

Author(s):

Mirac Alaf ◽

Mehmet Oguz Guler ◽

Deniz Gultekin ◽

Mehmet Uysal ◽

Ahmet Alp ◽

...

Keyword(s):

Physical Properties ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Tin Oxide ◽

Oxide Films ◽

Plasma Oxidation ◽

Thermal Deposition ◽

Effect Of Oxygen ◽

Pure Sn ◽

Tin Oxide Films

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The influence of oxygen partial pressure and total pressure (O2 + Ar) on the properties of tin oxide films prepared by dc sputtering

Vacuum ◽

10.1016/0042-207x(94)90080-9 ◽

1994 ◽

Vol 45 (12) ◽

pp. 1191-1195 ◽

Cited By ~ 15

Author(s):

Li-jian Meng ◽

MP dos Santos

Keyword(s):

Oxygen Partial Pressure ◽

Partial Pressure ◽

Tin Oxide ◽

Total Pressure ◽

Oxide Films ◽

Dc Sputtering ◽

Tin Oxide Films

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Influence of substrate temperature on the properties of laser ablated indium tin oxide films

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2007.05.009 ◽

2007 ◽

Vol 91 (15-16) ◽

pp. 1438-1443 ◽

Cited By ~ 34

Author(s):

D. Beena ◽

K.J. Lethy ◽

R. Vinodkumar ◽

V.P. MahadevanPillai

Keyword(s):

Substrate Temperature ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Influence Of Substrate ◽

Tin Oxide Films

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Study Of Indium Tin Oxide Films Exposed To Atomic Oxygen

10.1117/12.960955 ◽

1989 ◽

Cited By ~ 1

Author(s):

Paul G. Snyder ◽

Bhola N. De ◽

John A. .. WoolIam ◽

T. J. Coutts ◽

X. Li

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Atomic Oxygen ◽

Oxide Films ◽

Tin Oxide Films

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Indium tin oxide films with low resistivity and low internal stress

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1563623 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1351-1354 ◽

Cited By ~ 16

Author(s):

Shinji Takayama ◽

Toshifumi Sugawara ◽

Akira Tanaka ◽

Tokuji Himuro

Keyword(s):

Internal Stress ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Low Resistivity ◽

Tin Oxide Films

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High-quality indium tin oxide films prepared at room temperature by oxygen ion beam assisted deposition

EPL (Europhysics Letters) ◽

10.1209/epl/i2002-00147-6 ◽

2002 ◽

Vol 59 (4) ◽

pp. 606-611 ◽

Cited By ~ 14

Author(s):

C Liu ◽

T Matsutani ◽

N Yamamoto ◽

M Kiuchi

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Room Temperature ◽

Ion Beam ◽

Oxide Films ◽

High Quality ◽

Oxygen Ion ◽

Ion Beam Assisted Deposition ◽

Tin Oxide Films

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Ferromagnetism in transparent Mn(II)-doped indium tin oxide films prepared by sol–gel coating

Chemical Physics Letters ◽

10.1016/j.cplett.2009.01.004 ◽

2009 ◽

Vol 469 (4-6) ◽

pp. 313-317 ◽

Cited By ~ 11

Author(s):

Susmita Kundu ◽

Dipten Bhattacharya ◽

Jiten Ghosh ◽

Pintu Das ◽

Prasanta K. Biswas

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Sol Gel ◽

Oxide Films ◽

Tin Oxide Films

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The effect of ambient atmosphere in the annealing of indium tin oxide films

Journal of Applied Physics ◽

10.1063/1.328135 ◽

1980 ◽

Vol 51 (7) ◽

pp. 3890-3895 ◽

Cited By ~ 49

Author(s):

A. J. Steckl ◽

G. Mohammed

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Ambient Atmosphere ◽

Tin Oxide Films

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