Gas to Particle Conversion-Gas Exchange Technique for Direct Analysis of Metal Carbonyl Gas by Inductively Coupled Plasma Mass Spectrometry

2014 ◽  
Vol 86 (20) ◽  
pp. 10025-10029 ◽  
Author(s):  
Kohei Nishiguchi ◽  
Keisuke Utani ◽  
Detlef Gunther ◽  
Masaki Ohata
2021 ◽  
Vol 314 ◽  
pp. 17-22
Author(s):  
Katsu Kawabata ◽  
Kohei Nishiguchi ◽  
Tatsu Ichinose

Gas Exchange Device (GED) was integrated with Inductively Coupled Plasma Mass Spectrometry(ICP-MS) for analysis of metallic particles in NH3 and HCl gases used in semiconductormanufacturing. A single pg/kg (ppq) level of metallic impurities in these gases could be determinedwithout any sample preparation.


2017 ◽  
Vol 32 (4) ◽  
pp. 717-722 ◽  
Author(s):  
Masaki Ohata ◽  
Kohei Nishiguchi

For the first time, direct analysis of gaseous mercury (Hg) at a concentration level of a few ng m−3in ambient air using the gas to particle conversion-gas exchange technique, coupled with inductively coupled plasma mass spectrometry (ICPMS) has been achieved.


2010 ◽  
Vol 96 (1) ◽  
pp. 146-150 ◽  
Author(s):  
Renata S. Amais ◽  
Edivaldo E. Garcia ◽  
Marcos R. Monteiro ◽  
Ana Rita A. Nogueira ◽  
Joaquim A. Nóbrega

2020 ◽  
Vol 35 (10) ◽  
pp. 2179-2190
Author(s):  
Rodolfo Lorençatto ◽  
Gabriel Gustinelli Arantes de Carvalho ◽  
Pedro Vitoriano Oliveira

Direct analysis of liquid drug samples is proposed for determination of 24 elements using aerosol dilution, and multivariate studies for optimization of ICP-MS parameters were carried out.


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