Direct analysis of ultra-trace semiconductor gas by inductively coupled plasma mass spectrometry coupled with gas to particle conversion-gas exchange technique

2015 ◽  
Vol 891 ◽  
pp. 73-78 ◽  
Author(s):  
Masaki Ohata ◽  
Hiromu Sakurai ◽  
Kohei Nishiguchi ◽  
Keisuke Utani ◽  
Detlef Günther
Keyword(s):  
Mass Spectrometry ◽  
Gas Exchange ◽  
Inductively Coupled Plasma ◽  
Direct Analysis ◽  
Inductively Coupled ◽  
Plasma Mass Spectrometry ◽  
Ultra Trace ◽  
Exchange Technique

Direct Analysis of Ultra Trace Metallic Particles in NH3 and HCl Gases by Gas Exchange Device (GED)-ICP-MS

2021 ◽  
Vol 314 ◽  
pp. 17-22
Author(s):  
Katsu Kawabata ◽  
Kohei Nishiguchi ◽  
Tatsu Ichinose
Keyword(s):  
Mass Spectrometry ◽  
Gas Exchange ◽  
Inductively Coupled Plasma ◽  
Direct Analysis ◽  
Metallic Particles ◽  
Inductively Coupled ◽  
Icp Ms ◽  
Plasma Mass Spectrometry ◽  
Ultra Trace ◽  
Metallic Impurities

Gas Exchange Device (GED) was integrated with Inductively Coupled Plasma Mass Spectrometry(ICP-MS) for analysis of metallic particles in NH3 and HCl gases used in semiconductormanufacturing. A single pg/kg (ppq) level of metallic impurities in these gases could be determinedwithout any sample preparation.

Direct analysis of gaseous mercury in ambient air by gas to particle conversion-gas exchange ICPMS

2017 ◽  
Vol 32 (4) ◽  
pp. 717-722 ◽  
Author(s):  
Masaki Ohata ◽  
Kohei Nishiguchi
Keyword(s):  
Gas Exchange ◽  
Inductively Coupled Plasma ◽  
Concentration Level ◽  
Direct Analysis ◽  
Ambient Air ◽  
Inductively Coupled ◽  
Gaseous Mercury ◽  
Plasma Mass Spectrometry ◽  
First Time ◽  
Exchange Technique

For the first time, direct analysis of gaseous mercury (Hg) at a concentration level of a few ng m−3in ambient air using the gas to particle conversion-gas exchange technique, coupled with inductively coupled plasma mass spectrometry (ICPMS) has been achieved.

Simultaneous determination of ultra-trace Pt, Pd, Rh and Ir in geochemical samples by inductively coupled plasma mass spectrometry following tin fire assay preconcentration and microwave digestion

2020 ◽  
Vol 16 ◽  
Author(s):  
Wenshan Ni ◽  
Xiangju Mao ◽  
Hongli Zhang ◽  
Lu Liu ◽  
Xiaorui Guo ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Nickel Oxide ◽  
Inductively Coupled Plasma ◽  
Lead Oxide ◽  
Microwave Digestion ◽  
Fire Assay ◽  
Inductively Coupled ◽  
Plasma Mass Spectrometry ◽  
Ultra Trace

Background: Platinum (Pt), palladium (Pd), rhodium (Rh) and iridium (Ir) are platinum group elements (PGEs) and also important elements of geochemistry and environmental chemistry with the similar physic-chemical properties, which have been widely used in industry and laboratory. However, due to the low abundance and inhomogeneous distribution in natural ore as well as the nugget effect, the accurate determination of PGEs has been a challenge to analytical chemistry. Methods: In this work, a novel fire assay method was reported for the determination of ultra-trace Pt, Pd, Rh and Ir in geochemical samples. Tin powder (Sn) instead of stannic oxide (SnO2) was used as fire assay collector to reduce the melting temperature from 1250 oC to 1050 oC, the escape of molten material caused by high temperature was successfully avoided. Tin bead was compressed into thin slice and dissolved by HCl. For the target Pt, Pd, Rh and Ir, HCl insoluble substance such as PtSn4, PdSn4, RhSn4 and Ir3Sn7 were formed and separated from matrix by filtering. The metal compounds precipitate together with filter paper were microwave-assisted completely digested by aqua regia (50%, v/v), thence the sample solution were determined by inductively coupled plasma mass spectrometry (ICP-MS). Results: Compared with nickel oxide and lead oxide in nickel sulfide /lead fire assay, the reagent blank of tin powder were relatively low and could be directly employed in tin fire assay to collect Pt, Pd, Rh and Ir without purifying. Moreover, the harm of nickel oxide and lead oxide to the analyst and environment was avoided by using the non-toxic tin powder. The decomposition method of chromite and black shale were investigated as well as the amount of tin powder and flour, microwave digestion program for the determination of Pt, Pd, Rh and Ir were optimized. Besides, the influence of mass spectrum interference of co-existing elements was discussed and the standard mode and kinetic energy discrimination collision pool mode were compared. Under the optimal conditions, excellent curve fitting of Pt, Pd, Rh and Ir were obtained between 0.01～100 ng mL-1 , with the correlation coefficients exceeding 0.9996. The detection limits were from 0.003 ng g -1 to 0.057 ng g -1 . Conclusion: The developed method was applied to analyze the Chinese Certified Reference Materials and the determined values were in good agreement with the certified values.

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