Nonlinear Dynamic Analysis of Micro Cantilever Beam Under Electrostatic Loading

2012 ◽  
Vol 28 (1) ◽  
pp. 63-70 ◽  
Author(s):  
C.-C. Liu ◽  
S.-C. Yang ◽  
C.-K. Chen
Keyword(s):  
Cantilever Beam ◽  
Nonlinear Dynamic Analysis ◽  
Nonlinear Behavior ◽  
Computationally Efficient ◽  
Hybrid Scheme ◽  
Electrostatically Actuated ◽  
Aspect Ratios ◽  
Beam System ◽  
Length Width ◽  
Micro Cantilever

ABSTRACTA hybrid differential transformation / finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro cantilever beam which high aspect ratios (length/width). The validity of the proposed method is confirmed by comparing the numerical results obtained for the tip displacement and pull-in voltage of the cantilever beam with the analytical and experimental results presented in the literature. The hybrid scheme is then applied to analyze both the steady-state and the dynamic deflection behavior of the cantilever beam as a function of the applied voltage. Overall, the results confirm that the hybrid method provides an accurate and computationally-efficient means of analyzing the complex nonlinear behavior of both the current micro cantilever beam system and other micro-scale electrostatically-actuated structures.

Nonlinear Behavior Characterization of a 3-Layer Laminated Cantilever Beam System

2014 ◽  
Vol 3 (2) ◽  
Author(s):  
Liming Dai ◽  
Kai Huang ◽  
Tousheng Huang ◽  
Lin Sun
Keyword(s):  
Cantilever Beam ◽  
Nonlinear Behavior ◽  
Beam System

Experiment of Micro Cantilever Deflection by Thermal Bubble Growth in Liquid

2005 ◽  
Author(s):  
Heon J. Lee ◽  
Young-Soo Chang ◽  
Ho-Young Kim ◽  
Jong-Seob Ahn ◽  
Yoon-Pyo Lee
Keyword(s):  
Cantilever Beam ◽  
Beam Deflection ◽  
Mems Devices ◽  
Bubble Generation ◽  
Cantilever Deflection ◽  
Mems Fabrication ◽  
Length Width ◽  
Beam Interaction ◽  
Micro Cantilever ◽  
Significant Structure

Micro cantilevers are significant structure for MEMS devices, such as bio-chips, sensors and STEM/AFM probes. The beam deflection and its characteristics have been studied for various purposes. In this study, expending bubbles from thermal surface exert force on micro-cantilever beam and causes deflection of the beam. Cantilevers were fabricated by classic MEMS fabrication method; photolithography and dry etching. The micro-beam was fabricated from <100> n-type silicon wafer and its thickness varies from 10 micron to 30micron with various geometry (length, width and tip shapes). The distance from thermal surface and cantilever beam is also significant variables for analysis of bubble-beam interaction. We observed beam deflection with respect to various bubble generation conditions (bubble size, contact area and generating frequency). Simple analysis of bubble-beam interaction were performed and compared with experimental results.

scholarly journals Static Analysis of Electrostatically Actuated Micro Cantilever Beam

2013 ◽  
Vol 51 ◽  
pp. 776-780 ◽  
Author(s):  
Anchit J. Kaneria ◽  
D.S. Sharma ◽  
R.R. Trivedi
Keyword(s):  
Static Analysis ◽  
Cantilever Beam ◽  
Electrostatically Actuated ◽  
Micro Cantilever

Characteristics of Stress Distribution of Micro-Cantilever of Polycrystalline Copper at the Pull-in Voltage

2013 ◽  
Vol 300-301 ◽  
pp. 1309-1312
Author(s):  
Ji Long Su ◽  
Yan Jiao Zhang ◽  
Xing Feng Lian
Keyword(s):  
Stress Distribution ◽  
Cantilever Beam ◽  
Electrostatic Force ◽  
Polycrystalline Copper ◽  
Maximum Deflection ◽  
Micro Cantilever ◽  
Fixed End ◽  
The Relationship

The Ansys simulate software is utilized to analyze pull-in voltages and stresses of the fixed end of micro- cantilever beam with different thicknesses respectively. Based on the analysis of the electrostatic force at the pull-in voltage, the stress of fixed end of micro-beam and the maximum deflection are obtained. The relationship between the stress of fixed end and thickness is established. The results show that the mutation thickness of the stress and the pull-in voltage are at and respectively , it is consistent with the intrinsic size of the polycrystalline copper micro-beam.

scholarly journals Optimal Design of Capacitive Micro Cantilever Beam Accelerometer

2009 ◽  
Vol 3 (9) ◽  
Author(s):  
Othman Sidek ◽  
Muhamad Azman Miskam ◽  
H.M.T Khaleed ◽  
Mohd Fauzi Alias ◽  
Shukri Korakkottil Kunhi Mohd
Keyword(s):  
Optimal Design ◽  
Cantilever Beam ◽  
Micro Cantilever
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