Design of a robust controller and modeling aspects of a micro cantilever beam with fringing and squeezed gas film damping effects

Mechatronics ◽  
2013 ◽  
Vol 23 (1) ◽  
pp. 67-79 ◽  
Author(s):  
Marialena Vagia ◽  
Anthony Tzes
Keyword(s):  
Cantilever Beam ◽  
Robust Controller ◽  
Damping Effects ◽  
Micro Cantilever

Characteristics of Stress Distribution of Micro-Cantilever of Polycrystalline Copper at the Pull-in Voltage

2013 ◽  
Vol 300-301 ◽  
pp. 1309-1312
Author(s):  
Ji Long Su ◽  
Yan Jiao Zhang ◽  
Xing Feng Lian
Keyword(s):  
Stress Distribution ◽  
Cantilever Beam ◽  
Electrostatic Force ◽  
Polycrystalline Copper ◽  
Maximum Deflection ◽  
Micro Cantilever ◽  
Fixed End ◽  
The Relationship

The Ansys simulate software is utilized to analyze pull-in voltages and stresses of the fixed end of micro- cantilever beam with different thicknesses respectively. Based on the analysis of the electrostatic force at the pull-in voltage, the stress of fixed end of micro-beam and the maximum deflection are obtained. The relationship between the stress of fixed end and thickness is established. The results show that the mutation thickness of the stress and the pull-in voltage are at and respectively , it is consistent with the intrinsic size of the polycrystalline copper micro-beam.

scholarly journals Optimal Design of Capacitive Micro Cantilever Beam Accelerometer

2009 ◽  
Vol 3 (9) ◽  
Author(s):  
Othman Sidek ◽  
Muhamad Azman Miskam ◽  
H.M.T Khaleed ◽  
Mohd Fauzi Alias ◽  
Shukri Korakkottil Kunhi Mohd
Keyword(s):  
Optimal Design ◽  
Cantilever Beam ◽  
Micro Cantilever

Design and Fabrication of Micro-Cantilever Beam Fiber Bragg Grating Hydrogen Sensor Based on Coated-Palladium Film

2010 ◽  
Vol 37 (7) ◽  
pp. 1784-1788 ◽  
Author(s):  
张晓晶 Zhang Xiaojing ◽  
张博明 Zhang Boming ◽  
陈吉安 Chen Ji′an ◽  
武湛君 Wu Zhanjun
Keyword(s):  
Fiber Bragg Grating ◽  
Cantilever Beam ◽  
Hydrogen Sensor ◽  
Bragg Grating ◽  
Micro Cantilever

Intelligent vibration control of micro-cantilever beam in MEMS

2011 ◽  
Author(s):  
Atabak Sarrafan ◽  
Seiyed Hamid Zareh ◽  
Abolghassem Zabihollah ◽  
Amir Ali Khayyat
Keyword(s):  
Vibration Control ◽  
Cantilever Beam ◽  
Micro Cantilever

Investigation for dimension effect on mechanical behavior of a metallic curved micro-cantilever beam

Measurement ◽  
2011 ◽  
Vol 44 (2) ◽  
pp. 454-465 ◽  
Author(s):  
Alireza Shooshtari ◽  
Hamed Kalhori ◽  
Amirhasan Masoodian
Keyword(s):  
Mechanical Behavior ◽  
Cantilever Beam ◽  
Micro Cantilever

Experiment of Micro Cantilever Deflection by Thermal Bubble Growth in Liquid

2005 ◽  
Author(s):  
Heon J. Lee ◽  
Young-Soo Chang ◽  
Ho-Young Kim ◽  
Jong-Seob Ahn ◽  
Yoon-Pyo Lee
Keyword(s):  
Cantilever Beam ◽  
Beam Deflection ◽  
Mems Devices ◽  
Bubble Generation ◽  
Cantilever Deflection ◽  
Mems Fabrication ◽  
Length Width ◽  
Beam Interaction ◽  
Micro Cantilever ◽  
Significant Structure

Micro cantilevers are significant structure for MEMS devices, such as bio-chips, sensors and STEM/AFM probes. The beam deflection and its characteristics have been studied for various purposes. In this study, expending bubbles from thermal surface exert force on micro-cantilever beam and causes deflection of the beam. Cantilevers were fabricated by classic MEMS fabrication method; photolithography and dry etching. The micro-beam was fabricated from <100> n-type silicon wafer and its thickness varies from 10 micron to 30micron with various geometry (length, width and tip shapes). The distance from thermal surface and cantilever beam is also significant variables for analysis of bubble-beam interaction. We observed beam deflection with respect to various bubble generation conditions (bubble size, contact area and generating frequency). Simple analysis of bubble-beam interaction were performed and compared with experimental results.

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