Correlations between substrate bias, microstructure and surface morphology of tetrahedral amorphous carbon films

Jiaqi Zhu; Jiecai Han; Songhe Meng; Jinghe Wang; Weitao Zheng

doi:10.1016/j.vacuum.2003.08.005

Correlations between substrate bias, microstructure and surface morphology of tetrahedral amorphous carbon films

Vacuum ◽

10.1016/j.vacuum.2003.08.005 ◽

2003 ◽

Vol 72 (3) ◽

pp. 285-290 ◽

Cited By ~ 20

Author(s):

Jiaqi Zhu ◽

Jiecai Han ◽

Songhe Meng ◽

Jinghe Wang ◽

Weitao Zheng

Keyword(s):

Surface Morphology ◽

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon

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Effect of high substrate bias and hydrogen and nitrogen incorporation on spectroscopic ellipsometric and atomic force microscopic studies of tetrahedral amorphous carbon films

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.08.119 ◽

2010 ◽

Vol 205 (7) ◽

pp. 2126-2133 ◽

Cited By ~ 24

Author(s):

O.S. Panwar ◽

Mohd. Alim Khan ◽

Satyendra Kumar ◽

A. Basu ◽

B.R. Mehta ◽

...

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

High Substrate ◽

Tetrahedral Amorphous Carbon ◽

Atomic Force ◽

Nitrogen Incorporation ◽

Microscopic Studies

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Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films

Applied Surface Science ◽

10.1016/j.apsusc.2007.05.040 ◽

2007 ◽

Vol 253 (23) ◽

pp. 9124-9129 ◽

Cited By ~ 14

Author(s):

Aiping Liu ◽

Jiaqi Zhu ◽

Jiecai Han ◽

Huaping Wu ◽

Zechun Jia

Keyword(s):

Structural Properties ◽

Amorphous Carbon ◽

Growth Process ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon

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The effect of the substrate bias on structure and friction coefficient of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

Proceedings of the 2017 6th International Conference on Measurement, Instrumentation and Automation (ICMIA 2017) ◽

10.2991/icmia-17.2017.107 ◽

2017 ◽

Author(s):

Liang Han ◽

Wei Yang ◽

Bin Cui

Keyword(s):

Friction Coefficient ◽

Amorphous Carbon ◽

Carbon Films ◽

Vacuum Arc ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Filtered Cathodic Vacuum Arc

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Effect of high substrate bias and hydrogen and nitrogen incorporation on filtered cathodic vacuum arc deposited tetrahedral amorphous carbon films

Thin Solid Films ◽

10.1016/j.tsf.2007.09.024 ◽

2008 ◽

Vol 516 (8) ◽

pp. 2331-2340 ◽

Cited By ~ 35

Author(s):

O.S. Panwar ◽

Mohd. Alim Khan ◽

Mahesh Kumar ◽

S.M. Shivaprasad ◽

B.S. Satyanarayana ◽

...

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Vacuum Arc ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

High Substrate ◽

Tetrahedral Amorphous Carbon ◽

Nitrogen Incorporation ◽

Filtered Cathodic Vacuum Arc

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Surface morphology of nitrogen doped tetrahedral amorphous carbon films on silicon by atomic microscopy imaging

Materials Letters ◽

10.1016/s0167-577x(97)00129-8 ◽

1998 ◽

Vol 34 (1-2) ◽

pp. 1-4 ◽

Cited By ~ 6

Author(s):

Z.Y. Chen ◽

Y.H. Yu ◽

J.P. Zhao ◽

X. Wang ◽

S.Q. Yang ◽

...

Keyword(s):

Surface Morphology ◽

Amorphous Carbon ◽

Carbon Films ◽

Microscopy Imaging ◽

Amorphous Carbon Films ◽

Nitrogen Doped ◽

Tetrahedral Amorphous Carbon

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Substrate bias effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy

Diamond and Related Materials ◽

10.1016/j.diamond.2007.06.007 ◽

2007 ◽

Vol 16 (9) ◽

pp. 1746-1751 ◽

Cited By ~ 31

Author(s):

Fan-Xin Liu ◽

Kai-Lun Yao ◽

Zu-Li Liu

Keyword(s):

Raman Spectroscopy ◽

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Bias Effect ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon

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Effect of high substrate bias and hydrogen and nitrogen incorporation on density of states and field-emission threshold in tetrahedral amorphous carbon films

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3359586 ◽

2010 ◽

Vol 28 (2) ◽

pp. 411-422 ◽

Cited By ~ 17

Author(s):

O. S. Panwar ◽

M. A. Khan ◽

B. S. Satyanarayana ◽

R. Bhattacharyya ◽

B. R. Mehta ◽

...

Keyword(s):

Field Emission ◽

Density Of States ◽

Amorphous Carbon ◽

Carbon Films ◽

Substrate Bias ◽

Amorphous Carbon Films ◽

High Substrate ◽

Tetrahedral Amorphous Carbon ◽

Nitrogen Incorporation ◽

Emission Threshold

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Influence of hydrogen on the structure and properties of tetrahedral amorphous carbon films obtained by the filtered cathodic vacuum arc technique

Philosophical Magazine B ◽

10.1080/014186399256466 ◽

1999 ◽

Vol 79 (10) ◽

pp. 1647-1658

Author(s):

L. K. Cheah, X. Shi, E. Liu, B. K. Tay

Keyword(s):

Amorphous Carbon ◽

Carbon Films ◽

Vacuum Arc ◽

Structure And Properties ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Filtered Cathodic Vacuum Arc

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Thermal Stability of Tetrahedral Amorphous Carbon Films Fabricated by Filtered Cathodic Arc Technique

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2008.00789 ◽

2008 ◽

Vol 23 (4) ◽

pp. 789-793

Author(s):

Li-Zhao QIN

Keyword(s):

Thermal Stability ◽

Amorphous Carbon ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Cathodic Arc ◽

Thermal Stability Of

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Investigation of surface morphology of copper-modified amorphous carbon films

Semiconductors ◽

10.1134/1.1349938 ◽

2001 ◽

Vol 35 (2) ◽

pp. 230-234

Author(s):

T. K. Zvonareva ◽

V. I. Ivanov-Omskii ◽

S. G. Yastrebov ◽

A. O. Golubok ◽

O. M. Gorbenko ◽

...

Keyword(s):

Surface Morphology ◽

Amorphous Carbon ◽

Carbon Films ◽

Amorphous Carbon Films

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