Correlation between substrate bias, growth process and structural properties of phosphorus incorporated tetrahedral amorphous carbon films

2007 ◽  
Vol 253 (23) ◽  
pp. 9124-9129 ◽  
Author(s):  
Aiping Liu ◽  
Jiaqi Zhu ◽  
Jiecai Han ◽  
Huaping Wu ◽  
Zechun Jia
Keyword(s):  
Structural Properties ◽  
Amorphous Carbon ◽  
Growth Process ◽  
Carbon Films ◽  
Substrate Bias ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

Correlations between substrate bias, microstructure and surface morphology of tetrahedral amorphous carbon films

Vacuum ◽  
2003 ◽  
Vol 72 (3) ◽  
pp. 285-290 ◽  
Author(s):  
Jiaqi Zhu ◽  
Jiecai Han ◽  
Songhe Meng ◽  
Jinghe Wang ◽  
Weitao Zheng
Keyword(s):  
Surface Morphology ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Substrate Bias ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon
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