Effects of NH3 flow on structural and optical properties of ZnO films grown by atmospheric-pressure chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2019.02.024 ◽

2019 ◽

Vol 675 ◽

pp. 50-58

Author(s):

Tomoaki Terasako ◽

Yoshinori Ogura ◽

Masakazu Yagi

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Zno Films ◽

Structural And Optical Properties ◽

Pressure Chemical

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Optical properties of ZnO films grown by atmospheric-pressure chemical vapor deposition using Zn and H2O as source materials

Thin Solid Films ◽

10.1016/j.tsf.2007.06.130 ◽

2007 ◽

Vol 516 (2-4) ◽

pp. 159-164 ◽

Cited By ~ 13

Author(s):

T. Terasako ◽

M. Yagi ◽

M. Ishizaki ◽

Y. Senda ◽

H. Matsuura ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Zno Films ◽

Pressure Chemical ◽

Source Materials

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Structural and optical properties of ZnO films grown on ion-plated Ga doped ZnO buffer layers by atmospheric-pressure chemical vapor deposition using Zn and H2O as source materials

Thin Solid Films ◽

10.1016/j.tsf.2018.07.050 ◽

2018 ◽

Vol 663 ◽

pp. 79-84 ◽

Cited By ~ 2

Author(s):

Tomoaki Terasako ◽

Yohei Ochi ◽

Masakazu Yagi ◽

Junichi Nomoto ◽

Tetsuya Yamamoto

Keyword(s):

Optical Properties ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Buffer Layers ◽

Zno Films ◽

Structural And Optical Properties ◽

Pressure Chemical ◽

Doped Zno ◽

Source Materials

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Preparation of ZnO films by atmospheric pressure chemical-vapor deposition using zinc acetylacetonate and ozone

Thin Solid Films ◽

10.1016/s0040-6090(98)01649-6 ◽

1999 ◽

Vol 343-344 ◽

pp. 145-147 ◽

Cited By ~ 72

Author(s):

K. Haga ◽

F. Katahira ◽

H. Watanabe

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Zno Films ◽

Zinc Acetylacetonate ◽

Pressure Chemical

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Morphological, electrical and optical properties of highly oriented undoped and doped zinc oxide and cadmium oxide films grown by atmospheric-pressure chemical vapor deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2013.06.015 ◽

2013 ◽

Vol 230 ◽

pp. 245-253 ◽

Cited By ~ 9

Author(s):

Tomoaki Terasako ◽

Yoshinori Ogura ◽

Ken Ohmae ◽

Shohei Fujimoto ◽

Masakazu Yagi ◽

...

Keyword(s):

Zinc Oxide ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Oxide Films ◽

Cadmium Oxide ◽

Chemical Vapor ◽

Electrical And Optical Properties ◽

Pressure Chemical

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Structural and optical properties of Si∕SiO2 superlattices prepared by low pressure chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.2210667 ◽

2006 ◽

Vol 100 (1) ◽

pp. 013524 ◽

Cited By ~ 6

Author(s):

Zhenrui Yu ◽

Mariano Aceves-Mijares ◽

Enrique Quiroga ◽

R. Lopez-Estopier ◽

Jesus Carrillo ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Structural And Optical Properties ◽

Pressure Chemical

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Synthesis and optical properties of three-dimensional nanowall ZnO film prepared by atmospheric pressure chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2012.06.101 ◽

2012 ◽

Vol 258 (24) ◽

pp. 10175-10179 ◽

Cited By ~ 16

Author(s):

Zhenjun Li ◽

Zuofu Hu ◽

Li Jiang ◽

Haiqin Huang ◽

Fengjuan Liu ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Three Dimensional ◽

Chemical Vapor ◽

Zno Film ◽

Pressure Chemical

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Enhanced electrical and optical properties of boron-doped ZnO films grown by low pressure chemical vapor deposition for amorphous silicon solar cells

Ceramics International ◽

10.1016/j.ceramint.2015.09.075 ◽

2016 ◽

Vol 42 (1) ◽

pp. 1361-1365 ◽

Cited By ~ 17

Author(s):

Wang Li ◽

Yingyi Li ◽

Guoping Du ◽

Nan Chen ◽

Shiyong Liu ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Zno Films ◽

Electrical And Optical Properties ◽

Boron Doped ◽

Pressure Chemical ◽

Doped Zno

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Electrical and optical properties of doped tin and zinc oxide thin films by atmospheric pressure chemical vapor deposition

10.1063/1.42892 ◽

1992 ◽

Cited By ~ 1

Author(s):

Jianhua Hu ◽

Roy G. Gordon

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

Pressure Chemical

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Electrical and optical properties of titanium nitride coatings prepared by atmospheric pressure chemical vapor deposition

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2006.11.036 ◽

2008 ◽

Vol 354 (12-13) ◽

pp. 1272-1275 ◽

Cited By ~ 33

Author(s):

Gaoling Zhao ◽

Tianbo Zhang ◽

Tao Zhang ◽

Jianxun Wang ◽

Gaorong Han

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Titanium Nitride ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Electrical And Optical Properties ◽

Nitride Coatings ◽

Pressure Chemical

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High-quality, conductive, and transparent Ga-doped ZnO films grown by atmospheric-pressure chemical-vapor deposition

Ceramics International ◽

10.1016/j.ceramint.2014.10.028 ◽

2015 ◽

Vol 41 (2) ◽

pp. 2253-2259 ◽

Cited By ~ 20

Author(s):

Ha-Rim An ◽

Hyo-Jin Ahn ◽

Jeong-Woo Park

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Chemical Vapor ◽

Zno Films ◽

High Quality ◽

Pressure Chemical ◽

Doped Zno

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