Insulating and passivating plasma-enhanced atomic layer deposited aluminum oxide thin films for silicon solar cells

2018 ◽  
Vol 656 ◽  
pp. 53-60 ◽  
Author(s):  
Christian Reichel ◽  
Markus Reusch ◽  
Stefan Kotula ◽  
Filip Granek ◽  
Armin Richter ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Oxide Thin Films

scholarly journals Spatial Atomic Layer Deposition of Aluminum Oxide as a Passivating Hole Contact for Silicon Solar Cells

2020 ◽  
Vol 217 (18) ◽  
pp. 2000348
Author(s):  
Kortan Öğütman ◽  
Nafis Iqbal ◽  
Geoffrey Gregory ◽  
Mengjie Li ◽  
Michael Haslinger ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Layer Deposition

scholarly journals Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

2019 ◽  
Vol 37 (4) ◽  
pp. 040901 ◽  
Author(s):  
Fatemeh S. M. Hashemi ◽  
LiAo Cao ◽  
Felix Mattelaer ◽  
Timo Sajavaara ◽  
J. Ruud van Ommen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Nucleation Effects in the Atomic Layer Deposition of Nickel–Aluminum Oxide Thin Films

2020 ◽  
Vol 32 (5) ◽  
pp. 1925-1936 ◽  
Author(s):  
Jon G. Baker ◽  
Joel R. Schneider ◽  
James A. Raiford ◽  
Camila de Paula ◽  
Stacey F. Bent
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Nickel Aluminum ◽  
Oxide Thin Films ◽  
Layer Deposition

Contact passivation in silicon solar cells using atomic-layer-deposited aluminum oxide layers

2011 ◽  
Vol 5 (8) ◽  
pp. 298-300 ◽  
Author(s):  
Dimitri Zielke ◽  
Jan Hendrik Petermann ◽  
Florian Werner ◽  
Boris Veith ◽  
Rolf Brendel ◽  
...  
Keyword(s):  
Solar Cells ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Silicon Solar Cells ◽  
Oxide Layers
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