Thermal conductivity of titanium nitride/titanium aluminum nitride multilayer coatings deposited by lateral rotating cathode arc

2015 ◽  
Vol 578 ◽  
pp. 133-138 ◽  
Author(s):  
M.K. Samani ◽  
X.Z. Ding ◽  
N. Khosravian ◽  
B. Amin-Ahmadi ◽  
Yang Yi ◽  
...  
Keyword(s):  
Thermal Conductivity ◽  
Aluminum Nitride ◽  
Titanium Nitride ◽  
Multilayer Coatings ◽  
Titanium Aluminum ◽  
Cathode Arc ◽  
Titanium Aluminum Nitride

Precursors for the Chemical Vator Deposition of Titanium Nitride and Titanium Aluminum Nitride Films

1997 ◽  
Vol 495 ◽  
Author(s):  
Charles H. Winter ◽  
Peggy J. McKarns ◽  
Joseph T. Scheper
Keyword(s):  
Aluminum Nitride ◽  
Titanium Nitride ◽  
Ternary Alloys ◽  
Nitride Film ◽  
Film Properties ◽  
Properties And Characterization ◽  
New Process ◽  
Titanium Aluminum ◽  
Titanium Aluminum Nitride ◽  
Titanium Nitride Film

ABSTRACTTitanium nitride and ternary alloys thereof are of significant interest due to their hardness, chemical resistance, and good electrical conductivity. We report the synthesis, structure, and properties of several new precursors to titanium nitride that are based upon hydrazine-derived ligands. Application of these complexes in titanium nitride film depositions is overviewed. Film properties and characterization are presented. We also describe a new process for the preparation of titanium aluminum nitride films, and focus on how the presence of small amounts of aluminum change the properties of the material.

Thermal conductivity of titanium aluminum silicon nitride coatings deposited by lateral rotating cathode arc

2013 ◽  
Vol 537 ◽  
pp. 108-112 ◽  
Author(s):  
M.K. Samani ◽  
X.Z. Ding ◽  
S. Amini ◽  
N. Khosravian ◽  
J.Y. Cheong ◽  
...  
Keyword(s):  
Thermal Conductivity ◽  
Silicon Nitride ◽  
Titanium Aluminum ◽  
Nitride Coatings ◽  
Cathode Arc ◽  
Aluminum Silicon

Titanium-aluminum nitride film growth and related chemistry using dimethylamino-based precursors

2001 ◽  
Vol 385 (1-2) ◽  
pp. 66-73 ◽  
Author(s):  
J.P Endle ◽  
Y.-M Sun ◽  
J Silverman ◽  
N Nguyen ◽  
A H. Cowley ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Film Growth ◽  
Nitride Film ◽  
Titanium Aluminum ◽  
Titanium Aluminum Nitride

scholarly journals Unprecedented thermal stability of inherently metastable titanium aluminum nitride by point defect engineering

2016 ◽  
Vol 5 (3) ◽  
pp. 158-169 ◽  
Author(s):  
Moritz to Baben ◽  
Marcus Hans ◽  
Daniel Primetzhofer ◽  
Simon Evertz ◽  
Holger Ruess ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Aluminum Nitride ◽  
Point Defect ◽  
Defect Engineering ◽  
Titanium Aluminum ◽  
Titanium Aluminum Nitride ◽  
Thermal Stability Of
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