Block copolymer lithography: Feature size control and extension by an over-etch technique

2012 ◽  
Vol 522 ◽  
pp. 318-323 ◽  
Author(s):  
Sozaraj Rasappa ◽  
Dipu Borah ◽  
Ramsankar Senthamaraikannan ◽  
Colm C. Faulkner ◽  
Matthew T. Shaw ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Size Control ◽  
Feature Size ◽  
Block Copolymer Lithography ◽  
Feature Size Control ◽  
Copolymer Lithography

Block copolymer self-assembly assisted fabrication of laterally organized- and stacked- nanoarrays

2021 ◽  
Author(s):  
Vignesh Suresh ◽  
Ah Bian Chew ◽  
Christina Yuan Ling Tan ◽  
Hui Ru Tan
Keyword(s):  
Block Copolymer ◽  
Self Assembly ◽  
The Self ◽  
Functional Surfaces ◽  
Self Assembled ◽  
Block Copolymer Lithography ◽  
Unique Surface ◽  
Copolymer Lithography

Abstract Block copolymer (BCP) self-assembly processes are often seen as reliable techniques for advanced nanopatterning to achieve functional surfaces and create templates for nanofabrication. By taking advantage of the tunability in pitch, diameter and feature-to-feature separation of the self-assembled BCP features, complex, laterally organized- and stacked- multicomponent nanoarrays comprising of gold and polymer have been fabricated. The approaches not only demonstrate nanopatterning of up to two levels of hierarchy but also investigate how a variation in the feature-to-feature gap at the first hierarchy affects the self-assembly of polymer features at the second. Such BCP self-assembly enabled multicomponent nanoarray configurations are rarely achieved by other nanofabrication approaches and are particularly promising for pushing the boundaries of block copolymer lithography and in creating unique surface architectures and complex morphologies at the nanoscale.

Hierarchical nanopores formed by block copolymer lithography on the surfaces of different materials pre-patterned by nanosphere lithography

Nanoscale ◽  
2018 ◽  
Vol 10 (21) ◽  
pp. 10005-10017 ◽  
Author(s):  
Katharina Brassat ◽  
Daniel Kool ◽  
Julius Bürger ◽  
Jörg K. N. Lindner
Keyword(s):  
Block Copolymer ◽  
Nanosphere Lithography ◽  
Block Copolymer Lithography ◽  
Copolymer Lithography

Block copolymer lithography for the nanopatterning of Au, Pt and TiO2 surfaces is presented; by combining this technique with nanosphere lithography, we create hierarchical nanopores.

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