XPS study of the surface composition modification of nc-TiC/C nanocomposite films under in situ argon ion bombardment

2011 ◽  
Vol 519 (12) ◽  
pp. 3982-3985 ◽  
Author(s):  
A.A. El Mel ◽  
B. Angleraud ◽  
E. Gautron ◽  
A. Granier ◽  
P.Y. Tessier
Keyword(s):  
Surface Composition ◽  
Ion Bombardment ◽  
Nanocomposite Films ◽  
Composition Modification ◽  
Argon Ion Bombardment ◽  
Xps Study ◽  
Argon Ion

Study of the changes in the silicide surface composition under argon ion bombardment

1991 ◽  
Vol 251-252 ◽  
pp. 159-164 ◽  
Author(s):  
V.I. Zaporozchenko ◽  
S.S. Vojtusik ◽  
M.G. Stepanova ◽  
A.I. Zagorenko
Keyword(s):  
Surface Composition ◽  
Ion Bombardment ◽  
Argon Ion Bombardment ◽  
Argon Ion

The in situ cleaning of specimens in the field ion microscope by argon ion bombardment

1973 ◽  
Vol 34 (3) ◽  
pp. 597-612 ◽  
Author(s):  
G.K.L. Cranstoun ◽  
D.J. Browning ◽  
D.R. Pyke
Keyword(s):  
Ion Bombardment ◽  
Argon Ion Bombardment ◽  
Argon Ion ◽  
Field Ion Microscope

In Situ Ion Beam Cleaning in a Cambridge S-200 SEM

1990 ◽  
Vol 48 (2) ◽  
pp. 266-267
Author(s):  
F.C. Laabs
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Ion Beam ◽  
Energy Dispersive Spectrometer ◽  
Ion Bombardment ◽  
Structural Deformation ◽  
Argon Ion Bombardment ◽  
Argon Ion ◽  
Scanning Electron

The increased use of the scanning electron microscope as a flexible analytical tool has resulted in applying its use to a variety of problems which utilize signals that originate or are controlled by surface properties, including crystallographic orientation, contamination and structural deformation of the surface layer. This paper describes results and observations of efforts to control and remove that layer by energetic argon ion bombardment.Experimental A Kratos Mini-Beam I ion gun was attached to a Cambridge Model S-200 scanning electron microscope utilizing the horizontal port normally occupied by an energy dispersive spectrometer (Figure 1). The EDS spectrometer was moved to a position 35 degrees above the port position. This configuration results in the ion gun lying in a plane perpendicular to the electron beam and 45 degrees to the tilt axis, necessitating tilting the sample toward the ion beam during ion bombardment and, importantly, sputtered material is directed away from the EDS detector.

Study of the changes in the silicide surface composition under argon ion bombardment

1991 ◽  
Vol 251-252 ◽  
pp. A316
Author(s):  
V.I. Zaporozchenko ◽  
S.S. Vojtusik ◽  
M.G. Stepanova ◽  
A.I. Zagorenko
Keyword(s):  
Surface Composition ◽  
Ion Bombardment ◽  
Argon Ion Bombardment ◽  
Argon Ion

Preferential Sputtering of Ni3Al Single Crystals Studied Using Atom-Probe Field-Ion Microscopy and XPS

1981 ◽  
Vol 39 ◽  
pp. 16-17
Author(s):  
M.P. Thomas ◽  
A.R. Waugh ◽  
M.J. Southon ◽  
Brian Ralph
Keyword(s):  
Single Crystals ◽  
Photoelectron Spectroscopy ◽  
Surface Composition ◽  
Depth Profiling ◽  
Analytical Techniques ◽  
Atom Probe ◽  
Probe Field ◽  
Preferential Sputtering ◽  
Argon Ion Bombardment ◽  
Argon Ion

It is well known that ion-induced sputtering from numerous multicomponent targets results in marked changes in surface composition (1). Preferential removal of one component results in surface enrichment in the less easily removed species. In this investigation, a time-of-flight atom-probe field-ion microscope A.P. together with X-ray photoelectron spectroscopy XPS have been used to monitor alterations in surface composition of Ni3Al single crystals under argon ion bombardment. The A.P. has been chosen for this investigation because of its ability using field evaporation to depth profile through a sputtered surface without the need for further ion sputtering. Incident ion energy and ion dose have been selected to reflect conditions widely used in surface analytical techniques for cleaning and depth-profiling of samples, typically 3keV and 1018 - 1020 ion m-2.

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