Comparative properties of ternary oxides of ZrO2–TiO2–Y2O3 obtained by laser ablation, magnetron sputtering and sol–gel techniques

2007 ◽  
Vol 515 (16) ◽  
pp. 6484-6488 ◽  
Author(s):  
B. Mitu ◽  
S. Vizireanu ◽  
R. Birjega ◽  
M. Dinescu ◽  
S. Somacescu ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Magnetron Sputtering ◽  
Sol Gel ◽  
Ternary Oxides

Multi-level relief structures in sol–gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

2008 ◽  
Vol 254 (7) ◽  
pp. 1986-1992 ◽  
Author(s):  
E. Neiss ◽  
M. Flury ◽  
P. Gérard ◽  
L. Mager ◽  
J.-L. Rehspringer ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Sol Gel ◽  
Probe Microscopy ◽  
Multi Level

Effects of Sputter-Deposited LaNiO3 Electrode on the Deposition and Properties of Ferroelectric Thin Films

1996 ◽  
Vol 433 ◽  
Author(s):  
T. B. Wu ◽  
J. M. Wu ◽  
C. M. Wu ◽  
M. J. Shyu ◽  
M. S. Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Perovskite Phase ◽  
Sol Gel ◽  
Processing Condition ◽  
Fatigue Property ◽  
Rf Magnetron Sputtering ◽  
Ferroelectric Films ◽  
Si Substrates ◽  
Sputter Deposited

AbstractHighly (100)-textured thin film of metallic LaNiO3 (LNO) was grown on the Pt/Ti/SiO2/Si substrates by rf magnetron sputtering at ˜300°C, which was used as a bottom electrode to prepare highly (100)-textured ferroelectric films. Examples on the deposition of PbTiO3, (Pbl−xLax)TiO3, Pb(Zr0.53Ti0.47)O3, Pb[(Mg1/3Nb2/3)1−xTix]O3, and (Ba1−xSrx)TiO3 thin films by rf magnetron sputtering or sol-gel method are shown. A reduction of temperature for perovskite phase formation can be achieved, especially for those difficult to crystallize. The surface roughness of the ferroelectric films is also improved as compared to that of films deposited on conventional Pt electrode. Although the electrical properties of the ferroelectric films are affected by the out-diffusion of LNO when a higher temperature was used in the preparation of the films, under an appropriate processing condition, the highly (100)-textured films can have satisfactory electrical characteristics for application. Moreover, the polarization-fatigue property can be also improved by the use of LNO electrode.

scholarly journals Multi-level diffractive optical elements produced by excimer laser ablation of sol-gel

2008 ◽  
Vol 16 (18) ◽  
pp. 14044 ◽  
Author(s):  
Estelle Neiss ◽  
Manuel Flury ◽  
Loïc Mager ◽  
Jean-Luc Rehspringer ◽  
Alain Fort ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Excimer Laser ◽  
Sol Gel ◽  
Diffractive Optical Elements ◽  
Optical Elements ◽  
Excimer Laser Ablation ◽  
Multi Level

Orientation Control of Lead Zirconate Titanate Film by Combination of Sol-Gel and Sputtering Deposition

2005 ◽  
Vol 20 (1) ◽  
pp. 243-246 ◽  
Author(s):  
Chee-Sung Park ◽  
Sang-Wook Kim ◽  
Gun-Tae Park ◽  
Jong-Jin Choi ◽  
Hyoun-Ee Kim
Keyword(s):  
Magnetron Sputtering ◽  
Lead Zirconate Titanate ◽  
Seed Layer ◽  
Sol Gel ◽  
Rf Magnetron Sputtering ◽  
Lead Zirconate ◽  
Preferred Orientation ◽  
Sputtering Deposition ◽  
Oriented Film ◽  
Zirconate Titanate

Highly oriented lead zirconate titanate (PZT) films were fabricated on a platinized silicon substrate using a combination of sol-gel and radio frequency (RF) magnetron sputtering deposition methods. A sol-gel derived PZT layer highly oriented to the (100) plane was deposited as a seed layer, and PZT with the same composition then was deposited on the seed layer by RF-magnetron sputtering. The film deposited on the seed layer showed a strong (100) preferred orientation, while the film deposited without the seed layer showed a (111) preferred orientation. Furthermore, a thick PZT film of up to 4 μm was able to be deposited without cracks by using the seed layer. The piezoelectric property of the (100) oriented film was much better than that of the (111) oriented film.

Light absorption in Ge nanoclusters embedded in SiO2: comparison between magnetron sputtering and sol–gel synthesis

2013 ◽  
Vol 116 (1) ◽  
pp. 233-241 ◽  
Author(s):  
S. Cosentino ◽  
S. Knebel ◽  
S. Mirabella ◽  
S. Gibilisco ◽  
F. Simone ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Light Absorption ◽  
Sol Gel ◽  
Sol Gel Synthesis

Structure of Hydrogen Gas Sensing TiO2 Thin Films Prepared by Sol-Gel Method and their Comparison with Magnetron Sputtered Films

2013 ◽  
Vol 543 ◽  
pp. 293-296 ◽  
Author(s):  
G. Plesch ◽  
A.A. Haidry ◽  
M. Gregor ◽  
P. Durina ◽  
J. Gregus ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Gas Sensing ◽  
Sol Gel ◽  
Rutile Phase ◽  
Hydrogen Gas ◽  
Gel Method ◽  
Sensing Properties ◽  
Sol Gel Method ◽  
Coating Method

TiO2thin films with a thickness of about 150 nm were deposited by spin coating method on sapphire substrate from a sol-gel system. The hydrogen sensing properties of TiO2films annealed at various temperatures were studied and correlated with their structure, optical and electrical properties. The annealing temperatures in the range of 600 800 °C lead to anatase films with a roughness in the range of 0.6 0.9 nm. Their sensitivity towards hydrogen is low. The thin films annealed at temperatures in the range 900 1000 °C consist of rutile phase and their roughness increased to 11.7 13.5 nm. They showed good hydrogen sensitivity with optimal operating temperature 200 250 °C. The structure and sensing properties of the prepared films are compared with those synthesized with magnetron sputtering. The maximum of sensitivity was measured on the thin films with diameter of the grains about 100 nm in both cases, i.e. on thin films prepared by sol-gel method as well as on thin films prepared by magnetron sputtering. The maximum sensitivity correlates with the diameter of the grains and dont depend on the allotropy of the titanium dioxide anatase or rutile.

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