Textured indium tin oxide thin films by chemical solution deposition and rapid thermal processing

2007 ◽  
Vol 515 (7-8) ◽  
pp. 3918-3926 ◽  
Author(s):  
Matthew L. Mottern ◽  
Frode Tyholdt ◽  
Alexander Ulyashin ◽  
Antonius T.J. van Helvoort ◽  
Henk Verweij ◽  
...  
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Thermal Processing ◽  
Chemical Solution Deposition ◽  
Rapid Thermal Processing ◽  
Chemical Solution ◽  
Oxide Thin Films ◽  
Solution Deposition

scholarly journals Optimisation of chemical solution deposition of indium tin oxide thin films

2014 ◽  
Vol 573 ◽  
pp. 48-55 ◽  
Author(s):  
Tor Olav Løveng Sunde ◽  
Mari-Ann Einarsrud ◽  
Tor Grande
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Chemical Solution Deposition ◽  
Chemical Solution ◽  
Oxide Thin Films ◽  
Solution Deposition

scholarly journals Microwave plasma and rapid thermal processing of indium-tin oxide thin films for enhancing their performance as transparent electrodes

2019 ◽  
Vol 9 (03) ◽  
pp. 1 ◽  
Author(s):  
Rehab Ramadan ◽  
Kamal Abdelhady ◽  
Miguel Manso-Silván ◽  
Vicente Torres-Costa ◽  
Raul Jose Martín-Palma
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Thermal Processing ◽  
Microwave Plasma ◽  
Rapid Thermal Processing ◽  
Transparent Electrodes ◽  
Oxide Thin Films

scholarly journals Epitaxial K 0.5 Na 0.5 NbO 3 thin films by aqueous chemical solution deposition

2019 ◽  
Vol 6 (1) ◽  
pp. 180989 ◽  
Author(s):  
Ky-Nam Pham ◽  
Nikolai Helth Gaukås ◽  
Maxim Morozov ◽  
Thomas Tybell ◽  
Per Erik Vullum ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Chemical Solution Deposition ◽  
Rapid Thermal Processing ◽  
Secondary Phase ◽  
Epitaxial Films ◽  
Chemical Solution ◽  
Solution Deposition ◽  
Polycrystalline Layer ◽  
Oriented Polycrystalline

We report on an environmentally friendly and versatile aqueous chemical solution deposition route to epitaxial K 0.5 Na 0.5 NbO 3 (KNN) thin films. The route is based on the spin coating of an aqueous solution of soluble precursors on SrTiO 3 single crystal substrates followed by pyrolysis at 400°C and annealing at 800°C using rapid thermal processing. Strongly textured films with homogeneous thickness were obtained on three different crystallographic orientations of SrTiO 3 . Epitaxial films were obtained on (111) SrTiO 3 substrates, while films consisting of an epitaxial layer close to the substrate followed by an oriented polycrystalline layer were obtained on (100) and (110) SrTiO 3 substrates. A K 2 Nb 4 O 11 secondary phase was observed on the surface of the thin films due to the evaporation of alkali species, while the use of an NaCl/KCl flux reduced the amount of the secondary phase. Ferroelectric behaviour of the films was investigated by PFM, and almost no dependence on the film crystallographic orientation was observed. The permittivity and loss tangent of the films with the NaCl/KCl flux were 870 and 0.04 (100-orientation) and 2250 and 0.025 (110-orientation), respectively, at 1 kHz.

The Effects of Using ALD-Grown ZnO Buffer Layers on the Properties of Indium Tin Oxide Grown by Chemical Solution Deposition

2011 ◽  
Vol 11 (9) ◽  
pp. 8354-8357
Author(s):  
Shane O'Brien ◽  
Ian M. Povey ◽  
Jeff A. Hamilton ◽  
Andrew Kingsley ◽  
Philippe Thony ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Chemical Solution Deposition ◽  
Buffer Layers ◽  
Chemical Solution ◽  
Solution Deposition

scholarly journals Controlling Phase Purity and Texture of K0.5Na0.5NbO3 Thin Films by Aqueous Chemical Solution Deposition

Materials ◽  
2019 ◽  
Vol 12 (13) ◽  
pp. 2042 ◽  
Author(s):  
Nikolai Helth Gaukås ◽  
Silje Marie Dale ◽  
Trygve Magnus Ræder ◽  
Andreas Toresen ◽  
Randi Holmestad ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Chemical Solution Deposition ◽  
Alkali Metals ◽  
Decomposition Temperature ◽  
Chemical Solution ◽  
Secondary Phases ◽  
Solution Deposition ◽  
Phase Purity ◽  
Phase Pure

Aqueous chemical solution deposition (CSD) of lead-free ferroelectric K0.5Na0.5NbO3 (KNN) thin films has a great potential for cost-effective and environmentally friendly components in microelectronics. Phase purity of KNN is, however, a persistent challenge due to the volatility of alkali metal oxides, usually countered by using excess alkali metals in the precursor solutions. Here, we report on the development of two different aqueous precursor solutions for CSD of KNN films, and we demonstrate that the decomposition process during thermal processing of the films is of detrimental importance for promoting nucleation of KNN and suppressing the formation of secondary phases. Based on thermal analysis, X-ray diffraction and IR spectroscopy of films as well as powders prepared from the solutions, it was revealed that the decomposition temperature can be controlled by chemistry resulting in phase pure KNN films. A columnar microstructure with out-of-plane texturing was observed in the phase pure KNN films, demonstrating that the microstructure is directly coupled to the thermal processing of the films.

Synthesis and evaluation of new copper ketoiminate precursors for a facile and additive-free solution-based approach to nanoscale copper oxide thin films

2017 ◽  
Vol 46 (8) ◽  
pp. 2670-2679 ◽  
Author(s):  
Sarah Karle ◽  
Detlef Rogalla ◽  
Arne Ludwig ◽  
Hans-Werner Becker ◽  
Andreas Dirk Wieck ◽  
...  
Keyword(s):  
Thin Films ◽  
Copper Oxide ◽  
Chemical Solution Deposition ◽  
Free Solution ◽  
Chemical Solution ◽  
Oxide Thin Films ◽  
High Quality ◽  
Solution Deposition ◽  
P Type

A streamlined approach towards high-quality p-type CuOx nanostructures was successfully established based on rational precursor design for chemical solution deposition.

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